Microelectromechanical systems (MEMS) accelerometers using lead zirconate titanate thick films

L. P. Wang, K. Deng, L. Zou, R. Wolf, R. J. Davis, S. Trolier-McKinstry

Research output: Contribution to journalArticle

42 Scopus citations

Abstract

MEMS accelerometers based on piezoelectric lead zirconate titanate (PZT) thick films with annular diaphragm sensing structures were designed, fabricated, and tested. Theoretical and numerical models for this new inertial sensing structure are presented. The design provides good sensitivity along one axis, with low transverse sensitivity and good temperature stability. Test results show high sensitivities and broad usable frequency ranges. Measured sensitivities range from 0.77 to 7.6 pC/g for resonant frequencies from 35.3 kHz to 3.7 kHz. Reasonable agreement with theoretical values was obtained.

Original languageEnglish (US)
Pages (from-to)182-184
Number of pages3
JournalIEEE Electron Device Letters
Volume23
Issue number4
DOIs
StatePublished - Apr 1 2002

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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