Microfabrication of piezoelectric composite ultrasound transducers (PC-MUT)

X. Jiang, J. R. Yuan, A. Cheng, K. Snook, P. J. Cao, P. W. Rehrig, W. S. Hackenberger, G. Lavalelle, X. Geng, T. R. Shrout

Research output: Chapter in Book/Report/Conference proceedingConference contribution

49 Scopus citations

Abstract

In this paper a piezoelectric composite based micromachined ultrasound transducer (PC-MUT) fabrication technology is presented. PMN-PT single crystal posts with side length of 14 μm and height of > 60 μm were fabricated using a deep dry etching method. High frequency (20-50 MHz) PMN-PT single crystal/epoxy 1-3 composites were prepared and the electromechanical coupling coefficient of the composites was ~ 0.72. Prototype 40 MHz ultrasound transducers showed promising sensitivity and bandwidth.

Original languageEnglish (US)
Title of host publication2006 IEEE International Ultrasonics Symposium, IUS
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages922-925
Number of pages4
ISBN (Print)1424402018, 9781424402014
DOIs
StatePublished - 2006
Event2006 IEEE International Ultrasonics Symposium, IUS - Vancouver, BC, Canada
Duration: Oct 3 2006Oct 6 2006

Publication series

NameProceedings - IEEE Ultrasonics Symposium
Volume1
ISSN (Print)1051-0117

Other

Other2006 IEEE International Ultrasonics Symposium, IUS
CountryCanada
CityVancouver, BC
Period10/3/0610/6/06

All Science Journal Classification (ASJC) codes

  • Acoustics and Ultrasonics

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