Microfabrication of piezoelectric composite ultrasound transducers (PC-MUT)

X. Jiang, J. R. Yuan, A. Cheng, K. Snook, P. J. Cao, P. W. Rehrig, W. S. Hackenberger, G. Lavalelle, X. Geng, T. R. Shrout

Research output: Chapter in Book/Report/Conference proceedingConference contribution

47 Citations (Scopus)

Abstract

In this paper a piezoelectric composite based micromachined ultrasound transducer (PC-MUT) fabrication technology is presented. PMN-PT single crystal posts with side length of 14 μm and height of > 60 μm were fabricated using a deep dry etching method. High frequency (20-50 MHz) PMN-PT single crystal/epoxy 1-3 composites were prepared and the electromechanical coupling coefficient of the composites was ~ 0.72. Prototype 40 MHz ultrasound transducers showed promising sensitivity and bandwidth.

Original languageEnglish (US)
Title of host publication2006 IEEE International Ultrasonics Symposium, IUS
Pages918-921
Number of pages4
DOIs
StatePublished - Dec 1 2006

Publication series

NameProceedings - IEEE Ultrasonics Symposium
Volume1
ISSN (Print)1051-0117

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transducers
composite materials
single crystals
coupling coefficients
prototypes
etching
bandwidth
fabrication
sensitivity

All Science Journal Classification (ASJC) codes

  • Acoustics and Ultrasonics

Cite this

Jiang, X., Yuan, J. R., Cheng, A., Snook, K., Cao, P. J., Rehrig, P. W., ... Shrout, T. R. (2006). Microfabrication of piezoelectric composite ultrasound transducers (PC-MUT). In 2006 IEEE International Ultrasonics Symposium, IUS (pp. 918-921). [4152102] (Proceedings - IEEE Ultrasonics Symposium; Vol. 1). https://doi.org/10.1109/ULTSYM.2006.246
Jiang, X. ; Yuan, J. R. ; Cheng, A. ; Snook, K. ; Cao, P. J. ; Rehrig, P. W. ; Hackenberger, W. S. ; Lavalelle, G. ; Geng, X. ; Shrout, T. R. / Microfabrication of piezoelectric composite ultrasound transducers (PC-MUT). 2006 IEEE International Ultrasonics Symposium, IUS. 2006. pp. 918-921 (Proceedings - IEEE Ultrasonics Symposium).
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author = "X. Jiang and Yuan, {J. R.} and A. Cheng and K. Snook and Cao, {P. J.} and Rehrig, {P. W.} and Hackenberger, {W. S.} and G. Lavalelle and X. Geng and Shrout, {T. R.}",
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Jiang, X, Yuan, JR, Cheng, A, Snook, K, Cao, PJ, Rehrig, PW, Hackenberger, WS, Lavalelle, G, Geng, X & Shrout, TR 2006, Microfabrication of piezoelectric composite ultrasound transducers (PC-MUT). in 2006 IEEE International Ultrasonics Symposium, IUS., 4152102, Proceedings - IEEE Ultrasonics Symposium, vol. 1, pp. 918-921. https://doi.org/10.1109/ULTSYM.2006.246

Microfabrication of piezoelectric composite ultrasound transducers (PC-MUT). / Jiang, X.; Yuan, J. R.; Cheng, A.; Snook, K.; Cao, P. J.; Rehrig, P. W.; Hackenberger, W. S.; Lavalelle, G.; Geng, X.; Shrout, T. R.

2006 IEEE International Ultrasonics Symposium, IUS. 2006. p. 918-921 4152102 (Proceedings - IEEE Ultrasonics Symposium; Vol. 1).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Jiang X, Yuan JR, Cheng A, Snook K, Cao PJ, Rehrig PW et al. Microfabrication of piezoelectric composite ultrasound transducers (PC-MUT). In 2006 IEEE International Ultrasonics Symposium, IUS. 2006. p. 918-921. 4152102. (Proceedings - IEEE Ultrasonics Symposium). https://doi.org/10.1109/ULTSYM.2006.246