Micromachined magnetoflexoelastic resonator based magnetometer

Gokhan Hatipoglu, Srinivas A. Tadigadapa

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

In this paper, we demonstrate the performance of a magnetoflexoelastic magnetometer consisting of a micromachined ultra-thin (7.5 μm) quartz bulk acoustic resonator on which 500 nm thick magnetostrictive Metglas® (Fe85B5Si10) film is deposited. The resonance frequency of the unimorph resonator structure is sensitively affected by the magnetostrictively induced flexoelastic effect in quartz and is exploited to detect low frequency (<100 Hz) and nanoTesla magnetic fields. The resonance frequency shift is measured by tracking the at-resonance admittance of the resonator as a function of the applied magnetic field. The frequency shifts are linearly correlated to the magnetic field strength. A minimum detectable magnetic flux density of ∼79 nT has been measured for 10 Hz modulated magnetic field input signals which corresponds to a frequency sensitivity of 0.883 Hz/μT.

Original languageEnglish (US)
Article number192406
JournalApplied Physics Letters
Volume107
Issue number19
DOIs
StatePublished - Nov 9 2015

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magnetometers
resonators
magnetic fields
frequency shift
quartz
electrical impedance
magnetic flux
field strength
flux density
low frequencies
acoustics
sensitivity

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

Cite this

Hatipoglu, Gokhan ; Tadigadapa, Srinivas A. / Micromachined magnetoflexoelastic resonator based magnetometer. In: Applied Physics Letters. 2015 ; Vol. 107, No. 19.
@article{907aceb9ea204232b78591efb4477d3e,
title = "Micromachined magnetoflexoelastic resonator based magnetometer",
abstract = "In this paper, we demonstrate the performance of a magnetoflexoelastic magnetometer consisting of a micromachined ultra-thin (7.5 μm) quartz bulk acoustic resonator on which 500 nm thick magnetostrictive Metglas{\circledR} (Fe85B5Si10) film is deposited. The resonance frequency of the unimorph resonator structure is sensitively affected by the magnetostrictively induced flexoelastic effect in quartz and is exploited to detect low frequency (<100 Hz) and nanoTesla magnetic fields. The resonance frequency shift is measured by tracking the at-resonance admittance of the resonator as a function of the applied magnetic field. The frequency shifts are linearly correlated to the magnetic field strength. A minimum detectable magnetic flux density of ∼79 nT has been measured for 10 Hz modulated magnetic field input signals which corresponds to a frequency sensitivity of 0.883 Hz/μT.",
author = "Gokhan Hatipoglu and Tadigadapa, {Srinivas A.}",
year = "2015",
month = "11",
day = "9",
doi = "10.1063/1.4935790",
language = "English (US)",
volume = "107",
journal = "Applied Physics Letters",
issn = "0003-6951",
publisher = "American Institute of Physics Publising LLC",
number = "19",

}

Micromachined magnetoflexoelastic resonator based magnetometer. / Hatipoglu, Gokhan; Tadigadapa, Srinivas A.

In: Applied Physics Letters, Vol. 107, No. 19, 192406, 09.11.2015.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Micromachined magnetoflexoelastic resonator based magnetometer

AU - Hatipoglu, Gokhan

AU - Tadigadapa, Srinivas A.

PY - 2015/11/9

Y1 - 2015/11/9

N2 - In this paper, we demonstrate the performance of a magnetoflexoelastic magnetometer consisting of a micromachined ultra-thin (7.5 μm) quartz bulk acoustic resonator on which 500 nm thick magnetostrictive Metglas® (Fe85B5Si10) film is deposited. The resonance frequency of the unimorph resonator structure is sensitively affected by the magnetostrictively induced flexoelastic effect in quartz and is exploited to detect low frequency (<100 Hz) and nanoTesla magnetic fields. The resonance frequency shift is measured by tracking the at-resonance admittance of the resonator as a function of the applied magnetic field. The frequency shifts are linearly correlated to the magnetic field strength. A minimum detectable magnetic flux density of ∼79 nT has been measured for 10 Hz modulated magnetic field input signals which corresponds to a frequency sensitivity of 0.883 Hz/μT.

AB - In this paper, we demonstrate the performance of a magnetoflexoelastic magnetometer consisting of a micromachined ultra-thin (7.5 μm) quartz bulk acoustic resonator on which 500 nm thick magnetostrictive Metglas® (Fe85B5Si10) film is deposited. The resonance frequency of the unimorph resonator structure is sensitively affected by the magnetostrictively induced flexoelastic effect in quartz and is exploited to detect low frequency (<100 Hz) and nanoTesla magnetic fields. The resonance frequency shift is measured by tracking the at-resonance admittance of the resonator as a function of the applied magnetic field. The frequency shifts are linearly correlated to the magnetic field strength. A minimum detectable magnetic flux density of ∼79 nT has been measured for 10 Hz modulated magnetic field input signals which corresponds to a frequency sensitivity of 0.883 Hz/μT.

UR - http://www.scopus.com/inward/record.url?scp=84947249613&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84947249613&partnerID=8YFLogxK

U2 - 10.1063/1.4935790

DO - 10.1063/1.4935790

M3 - Article

AN - SCOPUS:84947249613

VL - 107

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 19

M1 - 192406

ER -