Micromachined multifunctional piezoelectric T-beam transducers

Z. Zhang, K. Mateti, C. D. Rahn, S. Tadigadapa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

This paper presents a novel MEMS piezoelectric cantilever beam with a T-shaped cross-section that can be used as both an actuator and a sensor. The micro T-beams are directly micromachined from bulk lead zirconate titanate (PZT) via deep reactive ion etching. The micromachined PZT T-beams are capable of in-plane and out-of-plane motion sensing and actuation via selective activation and measurements at different electrodes. The T-beam structures are tested as flexural actuators and also configured as accelerometers for sensing applications. Nine micromachined T-beams are fabricated and achieve up to 129 μm of out-of-plane displacement, 11.6 μm of in-plane displacement, 694 μN of out-of-plane blocking force, and an average acceleration sensitivity of 30.5 mV/g in 1-4.6 g’s range at a frequency of 1.3 kHz.

Original languageEnglish (US)
Title of host publication2010 Solid-State Sensors, Actuators, and Microsystems Workshop
EditorsDavid J. Monk, Kimberly L. Turner
PublisherTransducer Research Foundation
Pages246-249
Number of pages4
ISBN (Electronic)0964002485, 9780964002487
DOIs
StatePublished - Jan 1 2010
Event2010 Solid-State Sensors, Actuators, and Microsystems Workshop - Hilton Head Island, United States
Duration: Jun 6 2010Jun 10 2010

Publication series

NameTechnical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Conference

Conference2010 Solid-State Sensors, Actuators, and Microsystems Workshop
CountryUnited States
CityHilton Head Island
Period6/6/106/10/10

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Hardware and Architecture

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  • Cite this

    Zhang, Z., Mateti, K., Rahn, C. D., & Tadigadapa, S. (2010). Micromachined multifunctional piezoelectric T-beam transducers. In D. J. Monk, & K. L. Turner (Eds.), 2010 Solid-State Sensors, Actuators, and Microsystems Workshop (pp. 246-249). (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop). Transducer Research Foundation. https://doi.org/10.31438/trf.hh2010.65