Micromachined pmn-pt single crystal for advanced transducers

Xiaoning Jiang, Jian R. Yuan, An Cheng, Guy Lavallee, Paul Rehrig, Kevin Snook, Seongtae Kwon, Wesley Hackenberger, Jeffrey Catchmark, John McIntosh, Xuecang Geng

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

In this paper a deep reactive ion etching (DRIE) process developed for the micromachining of bulk piezoelectrics is discussed. For the first time, a PMN-PT single crystal piezoelectric micro-array was fabricated with an array post cross section size of 14 µm x 14 µm, a height of >60 µm, and a spacing between microposts of about 2-6 µm. The etched single crystal piezoelectrics retained high piezoelectricity (d33 ~2000 pC/N) and low dielectric loss (<0.01). Single crystal/epoxy 1-3 composites were fabricated using the etched micro-arrays and the electromechanical coupling coefficient of such piezoelectric composites was ~0.72, indicating promising applications such as micro-sensors, actuators and transducers.

Original languageEnglish (US)
Title of host publication2006 Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006
EditorsLeland Spangler, Thomas W. Kenny
PublisherTransducer Research Foundation
Pages384-387
Number of pages4
ISBN (Electronic)0964002469, 9780964002463
StatePublished - Jan 1 2006
Event13th Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006 - Hilton Head Island, United States
Duration: Jun 4 2006Jun 8 2006

Publication series

NameTechnical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Conference

Conference13th Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006
CountryUnited States
CityHilton Head Island
Period6/4/066/8/06

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All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Hardware and Architecture

Cite this

Jiang, X., Yuan, J. R., Cheng, A., Lavallee, G., Rehrig, P., Snook, K., Kwon, S., Hackenberger, W., Catchmark, J., McIntosh, J., & Geng, X. (2006). Micromachined pmn-pt single crystal for advanced transducers. In L. Spangler, & T. W. Kenny (Eds.), 2006 Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006 (pp. 384-387). (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop). Transducer Research Foundation.