@inproceedings{170c089d265e4658904ad6cdefd1b26e,
title = "Micromachined pmn-pt single crystal for advanced transducers",
abstract = "In this paper a deep reactive ion etching (DRIE) process developed for the micromachining of bulk piezoelectrics is discussed. For the first time, a PMN-PT single crystal piezoelectric micro-array was fabricated with an array post cross section size of 14 µm x 14 µm, a height of >60 µm, and a spacing between microposts of about 2-6 µm. The etched single crystal piezoelectrics retained high piezoelectricity (d33 ~2000 pC/N) and low dielectric loss (<0.01). Single crystal/epoxy 1-3 composites were fabricated using the etched micro-arrays and the electromechanical coupling coefficient of such piezoelectric composites was ~0.72, indicating promising applications such as micro-sensors, actuators and transducers.",
author = "Xiaoning Jiang and Yuan, {Jian R.} and An Cheng and Guy Lavallee and Paul Rehrig and Kevin Snook and Seongtae Kwon and Wesley Hackenberger and Jeffrey Catchmark and John McIntosh and Xuecang Geng",
year = "2006",
month = jan,
day = "1",
language = "English (US)",
series = "Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop",
publisher = "Transducer Research Foundation",
pages = "384--387",
editor = "Leland Spangler and Kenny, {Thomas W.}",
booktitle = "2006 Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006",
note = "13th Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2006 ; Conference date: 04-06-2006 Through 08-06-2006",
}