Micromachined quartz resonator-based high performance thermal sensors

Kailiang Ren, Marcelo B. Pisani, Ping Kao, Srinivas A. Tadigadapa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Scopus citations


This paper presents the design, fabrication, and characterization of temperature sensitive quartz resonators fabricated using heterogeneous integration methods for realizing high-density, thermal conductance fluctuation limited thermal sensors for infrared imaging and biochemical sensing applications. An integrated quartz sensor array using CMOS-compatible micromachining techniques has been designed and fabricated. 241 MHz micromachined resonators from Y-cut quartz crystal cuts were fabricated with a temperature sensitivity of 22.162 kHz/°C. Infrared measurements on the resonator pixel resulted in a noise equivalent power (NEP) of 3.90 nW/Hz 1/2, detectivity D* of 9.17 × 107 cmHz 1/2/W, and noise equivalent temperature difference (NETD) in the 8-12 μm wavelength region of 4 mK and a response time of < 30 Hz. In a unique new application a remotely coupled thermal sensor configuration was used to monitor biochemical reactions in real time.

Original languageEnglish (US)
Title of host publicationIEEE Sensors 2010 Conference, SENSORS 2010
Number of pages5
StatePublished - Dec 1 2010
Event9th IEEE Sensors Conference 2010, SENSORS 2010 - Waikoloa, HI, United States
Duration: Nov 1 2010Nov 4 2010

Publication series

NameProceedings of IEEE Sensors


Other9th IEEE Sensors Conference 2010, SENSORS 2010
Country/TerritoryUnited States
CityWaikoloa, HI

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering


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