TY - JOUR
T1 - Micromachining of PZT using ultrafast femtosecond laser
AU - Uppal, Nitin
AU - Shiakolas, Panos S.
AU - Priya, Shashank
N1 - Copyright:
Copyright 2008 Elsevier B.V., All rights reserved.
PY - 2005
Y1 - 2005
N2 - Pb(Zr,Ti)O3 (PZT) is widely used in various actuator and transducers applications. Recently, the emphasis has been on the fabrication of the micro actuation systems using PZT's. Fabrication of the micro components requires evolution of surface features and machining on the micrometer scale. The traditional micromachining of PZT's performed using EDM, ultrasonic milling, sand blasting and Nd:YAG lasers is an difficult, time consuming and multistep process. In this manuscript, we report the results on successful micromachining of hard and soft PZT's using a femtosecond laser micromachining (FLM) system. A comprehensive study was performed on the optimization of the laser parameters causing ablation without any physical microscopic damage. Using these optimized parameters, surface channels with excellent surface quality were machined on both hard and soft PZT's. The piezoelectric properties were found to be unaffected by FLM. Lastly, a 3-dimensional microgear (diameter ∼1.2 mm; teeth size ∼0.2mm) was fabricated from the hard PZT material. The results clearly demonstrate that the proposed FLM system is a viable and feasible technique for the rapid prototyping of PZT based 3D microcomponents and devices.
AB - Pb(Zr,Ti)O3 (PZT) is widely used in various actuator and transducers applications. Recently, the emphasis has been on the fabrication of the micro actuation systems using PZT's. Fabrication of the micro components requires evolution of surface features and machining on the micrometer scale. The traditional micromachining of PZT's performed using EDM, ultrasonic milling, sand blasting and Nd:YAG lasers is an difficult, time consuming and multistep process. In this manuscript, we report the results on successful micromachining of hard and soft PZT's using a femtosecond laser micromachining (FLM) system. A comprehensive study was performed on the optimization of the laser parameters causing ablation without any physical microscopic damage. Using these optimized parameters, surface channels with excellent surface quality were machined on both hard and soft PZT's. The piezoelectric properties were found to be unaffected by FLM. Lastly, a 3-dimensional microgear (diameter ∼1.2 mm; teeth size ∼0.2mm) was fabricated from the hard PZT material. The results clearly demonstrate that the proposed FLM system is a viable and feasible technique for the rapid prototyping of PZT based 3D microcomponents and devices.
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U2 - 10.1080/07315170500311465
DO - 10.1080/07315170500311465
M3 - Article
AN - SCOPUS:29144515335
VL - 32
SP - 67
EP - 77
JO - Ferroelectrics, Letters Section
JF - Ferroelectrics, Letters Section
SN - 0731-5171
IS - 3-4
ER -