Microstructural evolution of diamond growth during HFCVD

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Abstract

High resolution transmission electron microscopy (HRTEM) was used to study nucleation and growth mechanism of diamond by hot filament chemical vapor deposition (HFCVD) process. A novel technique has shown a direct evidence for the formation of the diamond-like carbon layer 8-14 nm thick in which small diamond micro-crystallites were embedded. These diamond micro-crystallites were formed as a result of transformation of diamond-like carbon into diamond. The diamond micro-crystallites present in the amorphous diamond-like carbon layer provided nucleation sites for diamond growth. Large diamond crystallites were observed to grow from these micro-crystallites. The mechanism of diamond growth will be presented based on experimental findings.

Original languageEnglish (US)
Pages (from-to)3197-3208
Number of pages12
JournalActa Metallurgica et Materialia
Volume42
Issue number9
DOIs
StatePublished - Jan 1 1994

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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