Microstructure and interfaces of thin film capacitors on base metal foils

T. Dechakupt, G. Yang, I. M. Reaney, C. A. Randall, S. Trolier-McKinstry

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The microstructure and interface quality of chemical solution deposited barium titanate thin films on Ni foil were studied. Cross-sectional transmission electron microscopy shows that a ∼200 nm thick barium titanate film annealed in a controlled oxygen partial pressure consists of equiaxed grains with grain size range of 24-75 nm (∼ 42 nm average). NiO was detected after re-oxidation by X-ray diffraction, but not by transmission electron microscopy, suggesting that the oxide is not a continuous barrier layer, but is spatially distributed in the films. Oxygen non-stoichiometry and the existence of C in barium titanate films were observed by electron energy loss spectrometry. In addition, it was found that there is a 5-8 nm thick Ni-Ba alloy developed at the interface between the barium titanate film and Ni foil.

Original languageEnglish (US)
Title of host publicationSmart Materials - International Conference on Smart Materials Smart/Intelligent Materials and Nanotechnology, (Smartmat-'08) and the 2nd International Workshop on Functional Materials and Nanomaterial
PublisherTrans Tech Publications
Pages917-920
Number of pages4
ISBN (Print)0878493565, 9780878493562
DOIs
StatePublished - 2008
EventInternational Conference on Smart Materials-Smart/Intelligent Materials and Nano Technology, (SmartMat-'08) and 2nd International Workshop on Functional Materials and Nanomaterials (IWOFM-2) - Chiang Mai, Thailand
Duration: Apr 22 2008Apr 25 2008

Publication series

NameAdvanced Materials Research
Volume55-57
ISSN (Print)1022-6680

Other

OtherInternational Conference on Smart Materials-Smart/Intelligent Materials and Nano Technology, (SmartMat-'08) and 2nd International Workshop on Functional Materials and Nanomaterials (IWOFM-2)
CountryThailand
CityChiang Mai
Period4/22/084/25/08

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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