Microthermopiles integrated with fluidic channels as calorimetric MEMS biosensors

Yuyan Zhang, Srinivas A. Tadigadapa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

This paper presents the fabrication and preliminary performance characteristics of a calorimetric MEMS biosensor. The sensor consists of freestanding microthermopiles integrated with polymeric microfluidic channels. The fabricated microthermopiles on a freestanding nitride-oxide-nitride membrane have a responsivity of 1.8 V/W and a time constant of less than 100 ms. Continuous flow testing was performed with hot water a evaluate the performance of the sensors. Measurements of the heat of reaction from the oxidation of glucose catalysed by glucose oxidase enzyme were performed using an open channel configuration. These measurements indicate that the up to 1 mM (1 nmole) sensitivity can be achieved using the sensor in open channel configuration.

Original languageEnglish (US)
Title of host publicationTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1176-1179
Number of pages4
ISBN (Electronic)0780377311, 9780780377318
DOIs
StatePublished - Jan 1 2003
Event12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States
Duration: Jun 8 2003Jun 12 2003

Publication series

NameTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Volume2

Other

Other12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
CountryUnited States
CityBoston
Period6/8/036/12/03

Fingerprint

Fluidics
Biosensors
MEMS
Nitrides
Sensors
Glucose oxidase
Microfluidics
Glucose
Enzymes
Membranes
Fabrication
Oxidation
Oxides
Testing
Water

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

Cite this

Zhang, Y., & Tadigadapa, S. A. (2003). Microthermopiles integrated with fluidic channels as calorimetric MEMS biosensors. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers (pp. 1176-1179). [1216981] (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers; Vol. 2). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SENSOR.2003.1216981
Zhang, Yuyan ; Tadigadapa, Srinivas A. / Microthermopiles integrated with fluidic channels as calorimetric MEMS biosensors. TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc., 2003. pp. 1176-1179 (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers).
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Zhang, Y & Tadigadapa, SA 2003, Microthermopiles integrated with fluidic channels as calorimetric MEMS biosensors. in TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers., 1216981, TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers, vol. 2, Institute of Electrical and Electronics Engineers Inc., pp. 1176-1179, 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers, Boston, United States, 6/8/03. https://doi.org/10.1109/SENSOR.2003.1216981

Microthermopiles integrated with fluidic channels as calorimetric MEMS biosensors. / Zhang, Yuyan; Tadigadapa, Srinivas A.

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc., 2003. p. 1176-1179 1216981 (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers; Vol. 2).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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N2 - This paper presents the fabrication and preliminary performance characteristics of a calorimetric MEMS biosensor. The sensor consists of freestanding microthermopiles integrated with polymeric microfluidic channels. The fabricated microthermopiles on a freestanding nitride-oxide-nitride membrane have a responsivity of 1.8 V/W and a time constant of less than 100 ms. Continuous flow testing was performed with hot water a evaluate the performance of the sensors. Measurements of the heat of reaction from the oxidation of glucose catalysed by glucose oxidase enzyme were performed using an open channel configuration. These measurements indicate that the up to 1 mM (1 nmole) sensitivity can be achieved using the sensor in open channel configuration.

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Zhang Y, Tadigadapa SA. Microthermopiles integrated with fluidic channels as calorimetric MEMS biosensors. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc. 2003. p. 1176-1179. 1216981. (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers). https://doi.org/10.1109/SENSOR.2003.1216981