Microwave properties of BST thin film interdigital capacitors on low cost alumina substrates

Jayesh Nath, Michael B. Steer, Dipankar Ghosh, Jon-Paul Maria, Angus Kingon, Gregory T. Stauf

Research output: Chapter in Book/Report/Conference proceedingConference contribution

19 Citations (Scopus)

Abstract

Barium Strontium Titanate (BST) thin films have a permittivity that is dependent on applied electric-field. As electronically tunable lumped capacitors they can be used as microwave varactors in phase shifters, tunable filters, and delay lines. Generally BST films are deposited on single crystalline substrates. This paper reports on the microwave properties of BST films deposited on low cost alumina substrates by means of metal organic chemical vapour deposition using inexpensive copper metallization. Interdigital capacitors were fabricated yielding capacitors in the sub-picofarad range and tunable by voltages up to 120 V. Low frequency intrinsic Q's of over 100 were obtained. This reduced to external Q's of 17 at 26GHz for 0.5 μm electrodes. The maximum dielectric tunability was found to be about 1.64:1 (40%) for an applied field of 300 kV/ cm at a bias of 120 V.

Original languageEnglish (US)
Title of host publicationConference Proceedings- 34th European Microwave Conference
Pages1497-1500
Number of pages4
Volume3
StatePublished - Dec 1 2004
EventConference Proceedings- 34th European Microwave Conference - London, United Kingdom
Duration: Oct 12 2004Oct 14 2004

Other

OtherConference Proceedings- 34th European Microwave Conference
CountryUnited Kingdom
CityLondon
Period10/12/0410/14/04

Fingerprint

Barium strontium titanate
Capacitors
Alumina
Microwaves
Substrates
Costs
Varactors
Phase shifters
Organic chemicals
Electric delay lines
Metallizing
Chemical vapor deposition
Permittivity
Electric fields
Crystalline materials
Copper
Thin films
Electrodes
Electric potential
Metals

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Nath, J., Steer, M. B., Ghosh, D., Maria, J-P., Kingon, A., & Stauf, G. T. (2004). Microwave properties of BST thin film interdigital capacitors on low cost alumina substrates. In Conference Proceedings- 34th European Microwave Conference (Vol. 3, pp. 1497-1500)
Nath, Jayesh ; Steer, Michael B. ; Ghosh, Dipankar ; Maria, Jon-Paul ; Kingon, Angus ; Stauf, Gregory T. / Microwave properties of BST thin film interdigital capacitors on low cost alumina substrates. Conference Proceedings- 34th European Microwave Conference. Vol. 3 2004. pp. 1497-1500
@inproceedings{1da7d5b9d6c5438aa07e5882f5f9bddb,
title = "Microwave properties of BST thin film interdigital capacitors on low cost alumina substrates",
abstract = "Barium Strontium Titanate (BST) thin films have a permittivity that is dependent on applied electric-field. As electronically tunable lumped capacitors they can be used as microwave varactors in phase shifters, tunable filters, and delay lines. Generally BST films are deposited on single crystalline substrates. This paper reports on the microwave properties of BST films deposited on low cost alumina substrates by means of metal organic chemical vapour deposition using inexpensive copper metallization. Interdigital capacitors were fabricated yielding capacitors in the sub-picofarad range and tunable by voltages up to 120 V. Low frequency intrinsic Q's of over 100 were obtained. This reduced to external Q's of 17 at 26GHz for 0.5 μm electrodes. The maximum dielectric tunability was found to be about 1.64:1 (40{\%}) for an applied field of 300 kV/ cm at a bias of 120 V.",
author = "Jayesh Nath and Steer, {Michael B.} and Dipankar Ghosh and Jon-Paul Maria and Angus Kingon and Stauf, {Gregory T.}",
year = "2004",
month = "12",
day = "1",
language = "English (US)",
isbn = "1580539920",
volume = "3",
pages = "1497--1500",
booktitle = "Conference Proceedings- 34th European Microwave Conference",

}

Nath, J, Steer, MB, Ghosh, D, Maria, J-P, Kingon, A & Stauf, GT 2004, Microwave properties of BST thin film interdigital capacitors on low cost alumina substrates. in Conference Proceedings- 34th European Microwave Conference. vol. 3, pp. 1497-1500, Conference Proceedings- 34th European Microwave Conference, London, United Kingdom, 10/12/04.

Microwave properties of BST thin film interdigital capacitors on low cost alumina substrates. / Nath, Jayesh; Steer, Michael B.; Ghosh, Dipankar; Maria, Jon-Paul; Kingon, Angus; Stauf, Gregory T.

Conference Proceedings- 34th European Microwave Conference. Vol. 3 2004. p. 1497-1500.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Microwave properties of BST thin film interdigital capacitors on low cost alumina substrates

AU - Nath, Jayesh

AU - Steer, Michael B.

AU - Ghosh, Dipankar

AU - Maria, Jon-Paul

AU - Kingon, Angus

AU - Stauf, Gregory T.

PY - 2004/12/1

Y1 - 2004/12/1

N2 - Barium Strontium Titanate (BST) thin films have a permittivity that is dependent on applied electric-field. As electronically tunable lumped capacitors they can be used as microwave varactors in phase shifters, tunable filters, and delay lines. Generally BST films are deposited on single crystalline substrates. This paper reports on the microwave properties of BST films deposited on low cost alumina substrates by means of metal organic chemical vapour deposition using inexpensive copper metallization. Interdigital capacitors were fabricated yielding capacitors in the sub-picofarad range and tunable by voltages up to 120 V. Low frequency intrinsic Q's of over 100 were obtained. This reduced to external Q's of 17 at 26GHz for 0.5 μm electrodes. The maximum dielectric tunability was found to be about 1.64:1 (40%) for an applied field of 300 kV/ cm at a bias of 120 V.

AB - Barium Strontium Titanate (BST) thin films have a permittivity that is dependent on applied electric-field. As electronically tunable lumped capacitors they can be used as microwave varactors in phase shifters, tunable filters, and delay lines. Generally BST films are deposited on single crystalline substrates. This paper reports on the microwave properties of BST films deposited on low cost alumina substrates by means of metal organic chemical vapour deposition using inexpensive copper metallization. Interdigital capacitors were fabricated yielding capacitors in the sub-picofarad range and tunable by voltages up to 120 V. Low frequency intrinsic Q's of over 100 were obtained. This reduced to external Q's of 17 at 26GHz for 0.5 μm electrodes. The maximum dielectric tunability was found to be about 1.64:1 (40%) for an applied field of 300 kV/ cm at a bias of 120 V.

UR - http://www.scopus.com/inward/record.url?scp=18844449912&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=18844449912&partnerID=8YFLogxK

M3 - Conference contribution

SN - 1580539920

VL - 3

SP - 1497

EP - 1500

BT - Conference Proceedings- 34th European Microwave Conference

ER -

Nath J, Steer MB, Ghosh D, Maria J-P, Kingon A, Stauf GT. Microwave properties of BST thin film interdigital capacitors on low cost alumina substrates. In Conference Proceedings- 34th European Microwave Conference. Vol. 3. 2004. p. 1497-1500