Miniature, high-sensitivity, electron tunneling accelerometer

Howard K. Rockstad, J. K. Reynolds, T. K. Tang, T. W. Kenny, W. J. Kaiser, Thomas B. Gabrielson

Research output: Contribution to conferencePaperpeer-review

10 Scopus citations

Abstract

Prototype low-noise miniature accelerometers have been fabricated with electron-tunneling transducers. The electron-tunneling transducer permits detection of small displacements of the proof mass with high electrical response; such a transducer is essential for a high-performance miniature accelerometer. Prototype accelerometers have shown self-noise of approximately 10-7 g per root Hz or less between 10 and 200 Hz, and close to 10-8 g per root Hz near the resonant frequency of 100 Hz. Directivity measurements give nulls at least 50 dB below the maximum. A dual-axis prototype designed for underwater acoustic applications is packaged in an 8 cm3 volume with a mass of 8 grams.

Original languageEnglish (US)
Pages675-678
Number of pages4
StatePublished - Dec 1 1995
EventProceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2) - Stockholm, Sweden
Duration: Jun 25 1995Jun 29 1995

Other

OtherProceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2)
CityStockholm, Sweden
Period6/25/956/29/95

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Fingerprint Dive into the research topics of 'Miniature, high-sensitivity, electron tunneling accelerometer'. Together they form a unique fingerprint.

Cite this