Mixed MD simulation - Analytical model analysis of Ag(111), C60 repetitive bombardment in the context of depth profiling for dynamic SIMS

Robert J. Paruch, Barbara Jane Garrison, Zbigniew Postawa

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

In this study, an analytical model is utilised to extract depth profiles from molecular dynamics simulations of dynamic secondary ion mass spectrometry (SIMS). The depth profiles for dynamic SIMS calculations for a reference system of C60 bombardment of Ag(111) with a kinetic energy of 20 keV and a polar angle of 0° are compared to those for 5 keV bombardment with a polar angle of 0° and 20 keV bombardment with a polar angle of 70°. It is shown that both decreasing the impact energy and making the polar angle more off-normal improve the depth resolution of the SIMS depth profile. The former condition, however, reduces the total sputtering yield achievable in the dynamic conditions making it less favourable for the depth profiling. It is also shown that the depth resolution dependence upon RMS roughness is not obvious when changing the primary beam conditions.

Original languageEnglish (US)
Pages (from-to)154-157
Number of pages4
JournalSurface and Interface Analysis
Volume45
Issue number1
DOIs
StatePublished - Jan 1 2013

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Depth profiling
Secondary ion mass spectrometry
secondary ion mass spectrometry
bombardment
Analytical models
simulation
Kinetic energy
Sputtering
Molecular dynamics
profiles
Surface roughness
reference systems
Computer simulation
roughness
kinetic energy
sputtering
molecular dynamics

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Materials Chemistry
  • Surfaces, Coatings and Films

Cite this

@article{48738b72e9a44d09a919dc1727ddc06c,
title = "Mixed MD simulation - Analytical model analysis of Ag(111), C60 repetitive bombardment in the context of depth profiling for dynamic SIMS",
abstract = "In this study, an analytical model is utilised to extract depth profiles from molecular dynamics simulations of dynamic secondary ion mass spectrometry (SIMS). The depth profiles for dynamic SIMS calculations for a reference system of C60 bombardment of Ag(111) with a kinetic energy of 20 keV and a polar angle of 0° are compared to those for 5 keV bombardment with a polar angle of 0° and 20 keV bombardment with a polar angle of 70°. It is shown that both decreasing the impact energy and making the polar angle more off-normal improve the depth resolution of the SIMS depth profile. The former condition, however, reduces the total sputtering yield achievable in the dynamic conditions making it less favourable for the depth profiling. It is also shown that the depth resolution dependence upon RMS roughness is not obvious when changing the primary beam conditions.",
author = "Paruch, {Robert J.} and Garrison, {Barbara Jane} and Zbigniew Postawa",
year = "2013",
month = "1",
day = "1",
doi = "10.1002/sia.4940",
language = "English (US)",
volume = "45",
pages = "154--157",
journal = "Surface and Interface Analysis",
issn = "0142-2421",
publisher = "John Wiley and Sons Ltd",
number = "1",

}

Mixed MD simulation - Analytical model analysis of Ag(111), C60 repetitive bombardment in the context of depth profiling for dynamic SIMS. / Paruch, Robert J.; Garrison, Barbara Jane; Postawa, Zbigniew.

In: Surface and Interface Analysis, Vol. 45, No. 1, 01.01.2013, p. 154-157.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Mixed MD simulation - Analytical model analysis of Ag(111), C60 repetitive bombardment in the context of depth profiling for dynamic SIMS

AU - Paruch, Robert J.

AU - Garrison, Barbara Jane

AU - Postawa, Zbigniew

PY - 2013/1/1

Y1 - 2013/1/1

N2 - In this study, an analytical model is utilised to extract depth profiles from molecular dynamics simulations of dynamic secondary ion mass spectrometry (SIMS). The depth profiles for dynamic SIMS calculations for a reference system of C60 bombardment of Ag(111) with a kinetic energy of 20 keV and a polar angle of 0° are compared to those for 5 keV bombardment with a polar angle of 0° and 20 keV bombardment with a polar angle of 70°. It is shown that both decreasing the impact energy and making the polar angle more off-normal improve the depth resolution of the SIMS depth profile. The former condition, however, reduces the total sputtering yield achievable in the dynamic conditions making it less favourable for the depth profiling. It is also shown that the depth resolution dependence upon RMS roughness is not obvious when changing the primary beam conditions.

AB - In this study, an analytical model is utilised to extract depth profiles from molecular dynamics simulations of dynamic secondary ion mass spectrometry (SIMS). The depth profiles for dynamic SIMS calculations for a reference system of C60 bombardment of Ag(111) with a kinetic energy of 20 keV and a polar angle of 0° are compared to those for 5 keV bombardment with a polar angle of 0° and 20 keV bombardment with a polar angle of 70°. It is shown that both decreasing the impact energy and making the polar angle more off-normal improve the depth resolution of the SIMS depth profile. The former condition, however, reduces the total sputtering yield achievable in the dynamic conditions making it less favourable for the depth profiling. It is also shown that the depth resolution dependence upon RMS roughness is not obvious when changing the primary beam conditions.

UR - http://www.scopus.com/inward/record.url?scp=84872869182&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84872869182&partnerID=8YFLogxK

U2 - 10.1002/sia.4940

DO - 10.1002/sia.4940

M3 - Article

AN - SCOPUS:84872869182

VL - 45

SP - 154

EP - 157

JO - Surface and Interface Analysis

JF - Surface and Interface Analysis

SN - 0142-2421

IS - 1

ER -