Modeling and experimental study on near-field acoustic levitation by flexural mode

Pinkuan Liu; Jin Li; Han Ding; Wenwu Cao

doi:10.1109/TUFFC.2009.1358

Modeling and experimental study on near-field acoustic levitation by flexural mode

Pinkuan Liu, Jin Li, Han Ding, Wenwu Cao

Research output: Contribution to journal › Article › peer-review

30 Scopus citations

Abstract

Near-field acoustic levitation (NFAL) has been used in noncontact handling and transportation of small objects to avoid contamination. We have performed a theoretical analysis based on nonuniform vibrating surface to quantify the levitation force produced by the air film and also conducted experimental tests to verify our model. Modal analysis was performed using ANSYS on the flexural plate radiator to obtain its natural frequency of desired mode, which is used to design the measurement system. Then, the levitation force was calculated as a function of levitation distance based on squeeze gas film theory using measured amplitude and phase distributions on the vibrator surface. Compared with previous fluidstructural analyses using a uniform piston motion, our model based on the nonuniform radiating surface of the vibrator is more realistic and fits better with experimentally measured levitation force.

Original language	English (US)
Article number	5307499
Pages (from-to)	2679-2685
Number of pages	7
Journal	IEEE transactions on ultrasonics, ferroelectrics, and frequency control
Volume	56
Issue number	12
DOIs	https://doi.org/10.1109/TUFFC.2009.1358
State	Published - Dec 2009

All Science Journal Classification (ASJC) codes

Instrumentation
Acoustics and Ultrasonics
Electrical and Electronic Engineering

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10.1109/TUFFC.2009.1358

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title = "Modeling and experimental study on near-field acoustic levitation by flexural mode",

abstract = "Near-field acoustic levitation (NFAL) has been used in noncontact handling and transportation of small objects to avoid contamination. We have performed a theoretical analysis based on nonuniform vibrating surface to quantify the levitation force produced by the air film and also conducted experimental tests to verify our model. Modal analysis was performed using ANSYS on the flexural plate radiator to obtain its natural frequency of desired mode, which is used to design the measurement system. Then, the levitation force was calculated as a function of levitation distance based on squeeze gas film theory using measured amplitude and phase distributions on the vibrator surface. Compared with previous fluidstructural analyses using a uniform piston motion, our model based on the nonuniform radiating surface of the vibrator is more realistic and fits better with experimentally measured levitation force.",

author = "Pinkuan Liu and Jin Li and Han Ding and Wenwu Cao",

note = "Funding Information: manuscript received January 9, 2009; accepted september 8, 2009. This work was supported in part by the national natural science Foundation of china under Grant 50675132. P. liu, J. li, and H. ding are with the school of mechanical Engineering, shanghai Jiao Tong University, shanghai, china. P. liu and H. ding are also with the state Key laboratory of mechanical system and Vibration, shanghai Jiao Tong University, shanghai, china (e-mail: pkliu@stju.edu.cn). W. cao is with the materials research Institute, The Pennsylvania state University, University Park, Pa. digital object Identifier 10.1109/TUFFc.2009.1358",

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doi = "10.1109/TUFFC.2009.1358",

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AB - Near-field acoustic levitation (NFAL) has been used in noncontact handling and transportation of small objects to avoid contamination. We have performed a theoretical analysis based on nonuniform vibrating surface to quantify the levitation force produced by the air film and also conducted experimental tests to verify our model. Modal analysis was performed using ANSYS on the flexural plate radiator to obtain its natural frequency of desired mode, which is used to design the measurement system. Then, the levitation force was calculated as a function of levitation distance based on squeeze gas film theory using measured amplitude and phase distributions on the vibrator surface. Compared with previous fluidstructural analyses using a uniform piston motion, our model based on the nonuniform radiating surface of the vibrator is more realistic and fits better with experimentally measured levitation force.

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Modeling and experimental study on near-field acoustic levitation by flexural mode

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