Modeling and experimental study on near-field acoustic levitation by flexural mode

Near-field acoustic levitation (NFAL) has been used in noncontact handling and transportation of small objects to avoid contamination. We have performed a theoretical analysis based on nonuniform vibrating surface to quantify the levitation force produced by the air film and also conducted experimental tests to verify our model. Modal analysis was performed using ANSYS on the flexural plate radiator to obtain its natural frequency of desired mode, which is used to design the measurement system. Then, the levitation force was calculated as a function of levitation distance based on squeeze gas film theory using measured amplitude and phase distributions on the vibrator surface. Compared with previous fluidstructural analyses using a uniform piston motion, our model based on the nonuniform radiating surface of the vibrator is more realistic and fits better with experimentally measured levitation force.