Modeling in-plane misalignments in lateral combdrive transducers

Ilya V. Avdeev, Michael R. Lovell, Oladipo Onipede, Jr.

Research output: Contribution to journalArticle

13 Scopus citations

Abstract

The misalignment of lateral combdrive fingers was studied using analytical and finite element modeling techniques. Based on the principle of virtual work, the required driving force, and the forces and moments that develop during in-plane combdrive misalignment were analytically calculated. Electrostatic uncoupled 2D and 3D finite element models were then used to perform energy computations during misalignment. Finally, a stability analysis of misaligned combdrive fingers was performed using a coupled 2D finite element approach. The analytical and numerical results were compared and found to vary due to fringing in the electrostatic fields. The significance of the fringing fields and stability equilibrium states were subsequently discussed with respect to the design of precision MEMS devices.

Original languageEnglish (US)
Pages (from-to)809-815
Number of pages7
JournalJournal of Micromechanics and Microengineering
Volume13
Issue number6
DOIs
Publication statusPublished - Nov 1 2003

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All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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