Modeling of substrate surface temperature distribution during hot-filament assisted diamond deposition

K. Tankala, Tarasankar Debroy, W. A. Yarbrough, C. J. Robinson

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

The importance of substrate temperature in determining the quality, uniformity and growth rate of diamond films is now well recognized. In the hot-filament assisted chemical vapor deposition of diamond, the mechanism of heat transfer is unique. In addition to conduction, convection and radiation, filament-to-substrate heat transfer takes place by dissociation of molecular hydrogen at or near the filament and recombination of atomic hydrogen at the substrate surface. In this paper, the role of atomic hydrogen recombination in heat transfer is examined. Furthermore, the effects of system geometry and process variables on the substrate temperature distribution are analyzed. The results indicate that atomic hydrogen recombination at the substrate plays a significant role in substrate heating. In hot-filament assisted diamond deposition, system geometry, filament temperature and pressure are the most important factors in determining the substrate temperature distribution.

Original languageEnglish (US)
Pages (from-to)1177-1184
Number of pages8
JournalDiamond and Related Materials
Volume1
Issue number12
DOIs
StatePublished - Dec 3 1992

Fingerprint

Diamond
surface temperature
Diamonds
filaments
Temperature distribution
temperature distribution
diamonds
Substrates
Hydrogen
hydrogen recombinations
heat transfer
Heat transfer
Geometry
Diamond films
hydrogen
geometry
diamond films
Chemical vapor deposition
convection
vapor deposition

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Chemistry(all)
  • Mechanical Engineering
  • Physics and Astronomy(all)
  • Materials Chemistry
  • Electrical and Electronic Engineering

Cite this

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abstract = "The importance of substrate temperature in determining the quality, uniformity and growth rate of diamond films is now well recognized. In the hot-filament assisted chemical vapor deposition of diamond, the mechanism of heat transfer is unique. In addition to conduction, convection and radiation, filament-to-substrate heat transfer takes place by dissociation of molecular hydrogen at or near the filament and recombination of atomic hydrogen at the substrate surface. In this paper, the role of atomic hydrogen recombination in heat transfer is examined. Furthermore, the effects of system geometry and process variables on the substrate temperature distribution are analyzed. The results indicate that atomic hydrogen recombination at the substrate plays a significant role in substrate heating. In hot-filament assisted diamond deposition, system geometry, filament temperature and pressure are the most important factors in determining the substrate temperature distribution.",
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Modeling of substrate surface temperature distribution during hot-filament assisted diamond deposition. / Tankala, K.; Debroy, Tarasankar; Yarbrough, W. A.; Robinson, C. J.

In: Diamond and Related Materials, Vol. 1, No. 12, 03.12.1992, p. 1177-1184.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Modeling of substrate surface temperature distribution during hot-filament assisted diamond deposition

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AU - Debroy, Tarasankar

AU - Yarbrough, W. A.

AU - Robinson, C. J.

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AB - The importance of substrate temperature in determining the quality, uniformity and growth rate of diamond films is now well recognized. In the hot-filament assisted chemical vapor deposition of diamond, the mechanism of heat transfer is unique. In addition to conduction, convection and radiation, filament-to-substrate heat transfer takes place by dissociation of molecular hydrogen at or near the filament and recombination of atomic hydrogen at the substrate surface. In this paper, the role of atomic hydrogen recombination in heat transfer is examined. Furthermore, the effects of system geometry and process variables on the substrate temperature distribution are analyzed. The results indicate that atomic hydrogen recombination at the substrate plays a significant role in substrate heating. In hot-filament assisted diamond deposition, system geometry, filament temperature and pressure are the most important factors in determining the substrate temperature distribution.

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