Modification of MeV He Implantation-Induced Cavities in Silicon by Hydrogen Plasma Treatment

C. L. Liu, E. Ntsoenzok, M. F. Barthe, P. Desgardin, S. Ashok, A. Vengurlekar, D. Alquier, M. O. Ruault

Research output: Contribution to journalConference articlepeer-review

3 Scopus citations

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