Molecular depth profiling with cluster secondary ion mass spectrometry and wedges

Dan Mao, Andreas Wucher, Nicholas Winograd

Research output: Contribution to journalArticle

20 Citations (Scopus)

Abstract

Secondary ion mass spectrometry and atomic force microscopy are employed to characterize a wedge-shaped crater eroded by 40 keV C60+ bombardment of a 395 nm thin film of Irganox 1010 doped with four delta layers of Irganox 3114. The wedge structure creates a laterally magnified cross section of the film. From an examination of the resulting surface, information about depth resolution, topography, and erosion rate can be obtained as a function of crater depth in a single experiment. This protocol provides a straightforward way to determine the parameters necessary to characterize molecular depth profiles and to obtain an accurate depth scale for erosion experiments.

Original languageEnglish (US)
Pages (from-to)57-60
Number of pages4
JournalAnalytical Chemistry
Volume82
Issue number1
DOIs
StatePublished - Feb 8 2010

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Depth profiling
Secondary ion mass spectrometry
Erosion
Topography
Atomic force microscopy
Experiments
Thin films
Irganox 1010
Irganox 3114

All Science Journal Classification (ASJC) codes

  • Analytical Chemistry

Cite this

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Molecular depth profiling with cluster secondary ion mass spectrometry and wedges. / Mao, Dan; Wucher, Andreas; Winograd, Nicholas.

In: Analytical Chemistry, Vol. 82, No. 1, 08.02.2010, p. 57-60.

Research output: Contribution to journalArticle

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