Molecular dynamics simulation of thin film nucleation through molecular cluster beam deposition: Effect of incident angle

Yanhong Hu, Susan B. Sinnott

Research output: Contribution to journalArticle

8 Scopus citations

Abstract

Deposition of organic cluster beams on solid substrates leads to the creation of thin films through rapid chemical reactions, which makes the process suitable for study by molecular dynamics (MD) simulations. In this work, angular effects of molecular organic beam deposition are studied extensively through classical MD simulations. The reactive empirical bond potential parameterized by Brenner is used. The specific system that is examined consists of an ethylene molecular cluster beam that is deposited on a hydrogen-terminated diamond (1 1 1) substrate at room temperature. The beam impacts the substrate along two crystallographic orientations at incident angles of 0°, 15°, 45° and 60° from the surface normal. Two sets of conditions are considered: one where the total incident energy is constant and one where the momentum normal to the surface is constant. The results are seen to depend on the total energy and incident angle and to be independent of crystallographic orientation.

Original languageEnglish (US)
Pages (from-to)329-338
Number of pages10
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume195
Issue number3-4
DOIs
StatePublished - Oct 1 2002

All Science Journal Classification (ASJC) codes

  • Nuclear and High Energy Physics
  • Instrumentation

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