Molecular dynamics study of the effect of surface topography on sputtering induced by 20 keV Au3 and C60 clusters

Robert Paruch, Lukasz Rzeznik, Michael F. Russo, Barbara Jane Garrison, Zbigniew Postawa

Research output: Contribution to journalArticle

24 Citations (Scopus)

Abstract

Molecular dynamics computer simulations are employed to investigate, at the atomic scale, the process of Ag(111) surface erosion stimulated by continuous bombardment by 20-keV Au3 and C60 clusters at 0° and 70° impact angles. The surface modification, the total sputtering yield, and the kinetic energy and angular distributions of ejected species are calculated at fluences ranging from 0 up to ∼3 × 1013 impacts/cm 2. It is shown that Au3 irradiation leads to a more corrugated surface as compared to C60 bombardment. The development of the surface topography and aggregated alteration of the bulk have a significant influence on the total sputtering yield and the angular spectra, whereas the shape of the kinetic energy distributions are not sensitive to the modification of the sample morphology.

Original languageEnglish (US)
Pages (from-to)5532-5539
Number of pages8
JournalJournal of Physical Chemistry C
Volume114
Issue number12
DOIs
StatePublished - Apr 1 2010

Fingerprint

Surface topography
Kinetic energy
Sputtering
Molecular dynamics
topography
sputtering
molecular dynamics
Angular distribution
Surface treatment
bombardment
Erosion
energy distribution
kinetic energy
Irradiation
Computer simulation
erosion
fluence
angular distribution
computerized simulation
irradiation

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Energy(all)
  • Surfaces, Coatings and Films
  • Physical and Theoretical Chemistry

Cite this

Paruch, Robert ; Rzeznik, Lukasz ; Russo, Michael F. ; Garrison, Barbara Jane ; Postawa, Zbigniew. / Molecular dynamics study of the effect of surface topography on sputtering induced by 20 keV Au3 and C60 clusters. In: Journal of Physical Chemistry C. 2010 ; Vol. 114, No. 12. pp. 5532-5539.
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Molecular dynamics study of the effect of surface topography on sputtering induced by 20 keV Au3 and C60 clusters. / Paruch, Robert; Rzeznik, Lukasz; Russo, Michael F.; Garrison, Barbara Jane; Postawa, Zbigniew.

In: Journal of Physical Chemistry C, Vol. 114, No. 12, 01.04.2010, p. 5532-5539.

Research output: Contribution to journalArticle

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T1 - Molecular dynamics study of the effect of surface topography on sputtering induced by 20 keV Au3 and C60 clusters

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AU - Rzeznik, Lukasz

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AU - Postawa, Zbigniew

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AB - Molecular dynamics computer simulations are employed to investigate, at the atomic scale, the process of Ag(111) surface erosion stimulated by continuous bombardment by 20-keV Au3 and C60 clusters at 0° and 70° impact angles. The surface modification, the total sputtering yield, and the kinetic energy and angular distributions of ejected species are calculated at fluences ranging from 0 up to ∼3 × 1013 impacts/cm 2. It is shown that Au3 irradiation leads to a more corrugated surface as compared to C60 bombardment. The development of the surface topography and aggregated alteration of the bulk have a significant influence on the total sputtering yield and the angular spectra, whereas the shape of the kinetic energy distributions are not sensitive to the modification of the sample morphology.

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