Molecular dynamics study of the effect of surface topography on sputtering induced by 20 keV Au₃ and C₆₀ clusters

Engineering & Materials Science

• Sputtering 100%
• Surface topography 94%
• Molecular dynamics 87%
• Kinetic energy 82%
• Angular distribution 62%
• Surface treatment 41%
• Irradiation 40%
• Erosion 38%
• Computer simulation 21%

Chemical Compounds

• Kinetic Energy 90%
• Sputtering 84%
• Corrugated Surface 66%
• Molecular Cluster 50%
• Surface Modification 33%
• Reaction Yield 31%
• Molecular Dynamics 28%
• Shape 25%
• Surface 24%
• Simulation 24%
• Modification 21%

Physics & Astronomy

• topography 72%
• sputtering 61%
• molecular dynamics 56%
• bombardment 36%
• energy distribution 34%
• kinetic energy 31%
• erosion 19%
• angular distribution 16%
• fluence 16%
• computerized simulation 15%
• irradiation 12%