Monolithic MEMS optical switch with amplified out-of-plane angular motion

D. López, M. E. Simon, F. Pardo, V. Aksyuk, F. Klemens, R. Cirelli, D. T. Neilson, H. Shea, T. Sorsch, E. Ferry, O. Nalamasu, P. L. Gammel

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We describe an array of electrostatically actuated surface micromachined mirrors for fiber-optic switching. Using a pure flexure angle amplification mechanism the mirrors can be tilted continuously from 0 to 14 degrees with less than 60 V.

Original languageEnglish (US)
Title of host publication2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages165-166
Number of pages2
ISBN (Electronic)0780375955, 9780780375956
DOIs
StatePublished - 2002
EventIEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Lugano, Switzerland
Duration: Aug 20 2002Aug 23 2002

Publication series

Name2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest

Conference

ConferenceIEEE/LEOS International Conference on Optical MEMs, OMEMS 2002
CountrySwitzerland
CityLugano
Period8/20/028/23/02

All Science Journal Classification (ASJC) codes

  • Hardware and Architecture
  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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