Morphology and gas barrier properties of thin SiOx coatings on polycarbonate: Correlations with plasma-enhanced chemical vapor deposition conditions

Ahmet G. Erlat, Bo Chy Wang, Richard J. Spontak, Yelena Tropsha, Kevin D. Mar, David B. Montgomery, Erwin A. Vogler

Research output: Contribution to journalArticlepeer-review

54 Scopus citations

Abstract

Plasma-enhanced chemical vapor deposition of SiOx coatings on thermoplastics provides a viable route for production of transparent composite materials with high fracture toughness and high gas barrier properties, which are important considerations in the food packaging and biomedical device industries. By examining several series of systematically varied SiOx/polycarbonate composites, we have identified design correlations between coating characteristics (thickness, density, surface roughness, and O2 transmission) and deposition conditions (time, power, pressure, and flow rates) of particular interest is the observation that the thermal activation energy for O2 permeation through these composites increases (by up to 17 kJ/mol) as their barrier efficacy increases.

Original languageEnglish (US)
Pages (from-to)704-717
Number of pages14
JournalJournal of Materials Research
Volume15
Issue number3
DOIs
StatePublished - Mar 2000

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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