MP-A7 Fabrication of Devices with Submicrometer Dimensions Using a Selective Edge Plating Technique and Conventional Photolithography

Thomas Nelson Jackson, N. A. Masnari

Research output: Contribution to journalArticle

1 Citation (Scopus)
Original languageEnglish (US)
Number of pages1
JournalIEEE Transactions on Electron Devices
Volume26
Issue number11
DOIs
StatePublished - Jan 1 1979

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Photolithography
Plating
Fabrication

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

Cite this

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