Multifrequency excitation of a clamped-clamped microbeam

Nizar R. Jaber, Abdallah Ramini, Mohammad Younis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

We present analytical and experimental investigation of an electrically actuated clamped-clamped microbeam under a twosource harmonic excitation. The first frequency is swept around the first mode of vibration where the second one is fixed. These microbeams are fabricated using polyimide as structural layer coated with nickel form top and chromium and gold layers from bottom. We demonstrate the excitation of additive and subtractive type resonance. We show that by properly tuning the frequency and the amplitude of the excitation force, the frequency bandwidth of the resonator is increased. Theoretically, we solved the eigenvalue problem for different axial forces to find the natural frequencies ratio that match the experimental values. Using Galerkin method, a reduced order model is derived to simulate the static and dynamic response of the device where using three symmetric mode shapes provided a good agreement with experimental data.

Original languageEnglish (US)
Title of host publication20th Design for Manufacturing and the Life Cycle Conference; 9th International Conference on Micro- and Nanosystems
PublisherAmerican Society of Mechanical Engineers (ASME)
ISBN (Electronic)9780791857113
DOIs
StatePublished - Jan 1 2015
EventASME 2015 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2015 - Boston, United States
Duration: Aug 2 2015Aug 5 2015

Publication series

NameProceedings of the ASME Design Engineering Technical Conference
Volume4

Other

OtherASME 2015 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2015
CountryUnited States
CityBoston
Period8/2/158/5/15

Fingerprint

Galerkin methods
Polyimides
Dynamic response
Resonators
Natural frequencies
Chromium
Tuning
Excitation
Gold
Nickel
Bandwidth
Polyimide
Reduced Order Model
Mode Shape
Sweep
Resonator
Natural Frequency
Experimental Investigation
Dynamic Response
Galerkin Method

All Science Journal Classification (ASJC) codes

  • Modeling and Simulation
  • Mechanical Engineering
  • Computer Science Applications
  • Computer Graphics and Computer-Aided Design

Cite this

Jaber, N. R., Ramini, A., & Younis, M. (2015). Multifrequency excitation of a clamped-clamped microbeam. In 20th Design for Manufacturing and the Life Cycle Conference; 9th International Conference on Micro- and Nanosystems (Proceedings of the ASME Design Engineering Technical Conference; Vol. 4). American Society of Mechanical Engineers (ASME). https://doi.org/10.1115/DETC2015-47150
Jaber, Nizar R. ; Ramini, Abdallah ; Younis, Mohammad. / Multifrequency excitation of a clamped-clamped microbeam. 20th Design for Manufacturing and the Life Cycle Conference; 9th International Conference on Micro- and Nanosystems. American Society of Mechanical Engineers (ASME), 2015. (Proceedings of the ASME Design Engineering Technical Conference).
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abstract = "We present analytical and experimental investigation of an electrically actuated clamped-clamped microbeam under a twosource harmonic excitation. The first frequency is swept around the first mode of vibration where the second one is fixed. These microbeams are fabricated using polyimide as structural layer coated with nickel form top and chromium and gold layers from bottom. We demonstrate the excitation of additive and subtractive type resonance. We show that by properly tuning the frequency and the amplitude of the excitation force, the frequency bandwidth of the resonator is increased. Theoretically, we solved the eigenvalue problem for different axial forces to find the natural frequencies ratio that match the experimental values. Using Galerkin method, a reduced order model is derived to simulate the static and dynamic response of the device where using three symmetric mode shapes provided a good agreement with experimental data.",
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Jaber, NR, Ramini, A & Younis, M 2015, Multifrequency excitation of a clamped-clamped microbeam. in 20th Design for Manufacturing and the Life Cycle Conference; 9th International Conference on Micro- and Nanosystems. Proceedings of the ASME Design Engineering Technical Conference, vol. 4, American Society of Mechanical Engineers (ASME), ASME 2015 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2015, Boston, United States, 8/2/15. https://doi.org/10.1115/DETC2015-47150

Multifrequency excitation of a clamped-clamped microbeam. / Jaber, Nizar R.; Ramini, Abdallah; Younis, Mohammad.

20th Design for Manufacturing and the Life Cycle Conference; 9th International Conference on Micro- and Nanosystems. American Society of Mechanical Engineers (ASME), 2015. (Proceedings of the ASME Design Engineering Technical Conference; Vol. 4).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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N2 - We present analytical and experimental investigation of an electrically actuated clamped-clamped microbeam under a twosource harmonic excitation. The first frequency is swept around the first mode of vibration where the second one is fixed. These microbeams are fabricated using polyimide as structural layer coated with nickel form top and chromium and gold layers from bottom. We demonstrate the excitation of additive and subtractive type resonance. We show that by properly tuning the frequency and the amplitude of the excitation force, the frequency bandwidth of the resonator is increased. Theoretically, we solved the eigenvalue problem for different axial forces to find the natural frequencies ratio that match the experimental values. Using Galerkin method, a reduced order model is derived to simulate the static and dynamic response of the device where using three symmetric mode shapes provided a good agreement with experimental data.

AB - We present analytical and experimental investigation of an electrically actuated clamped-clamped microbeam under a twosource harmonic excitation. The first frequency is swept around the first mode of vibration where the second one is fixed. These microbeams are fabricated using polyimide as structural layer coated with nickel form top and chromium and gold layers from bottom. We demonstrate the excitation of additive and subtractive type resonance. We show that by properly tuning the frequency and the amplitude of the excitation force, the frequency bandwidth of the resonator is increased. Theoretically, we solved the eigenvalue problem for different axial forces to find the natural frequencies ratio that match the experimental values. Using Galerkin method, a reduced order model is derived to simulate the static and dynamic response of the device where using three symmetric mode shapes provided a good agreement with experimental data.

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Jaber NR, Ramini A, Younis M. Multifrequency excitation of a clamped-clamped microbeam. In 20th Design for Manufacturing and the Life Cycle Conference; 9th International Conference on Micro- and Nanosystems. American Society of Mechanical Engineers (ASME). 2015. (Proceedings of the ASME Design Engineering Technical Conference). https://doi.org/10.1115/DETC2015-47150