TY - JOUR
T1 - Multifrequency excitation of a clamped–clamped microbeam
T2 - Analytical and experimental investigation
AU - Jaber, Nizar
AU - Ramini, Abdallah
AU - Younis, Mohammad I.
N1 - Funding Information:
We acknowledge financial support from King Abdullah University of Science and Technology.
Publisher Copyright:
© 2016, Nature Publishing Group. All rights reserved.
PY - 2016
Y1 - 2016
N2 - Using partial electrodes and a multifrequency electrical source, we present a large-bandwidth, large-amplitude clamped–clamped microbeam resonator excited near the higher order modes of vibration. We analytically and experimentally investigate the nonlinear dynamics of the microbeam under a two-source harmonic excitation. The first-frequency source is swept around the first three modes of vibration, whereas the second source frequency remains fixed. New additive and subtractive resonances are demonstrated. We illustrated that by properly tuning the frequency and amplitude of the excitation force, the frequency bandwidth of the resonator is controlled. The microbeam is fabricated using polyimide as a structural layer coated with nickel from the top and chromium and gold layers from the bottom. Using the Galerkin method, a reduced order model is derived to simulate the static and dynamic response of the device. A good agreement between the theoretical and experimental data are reported.
AB - Using partial electrodes and a multifrequency electrical source, we present a large-bandwidth, large-amplitude clamped–clamped microbeam resonator excited near the higher order modes of vibration. We analytically and experimentally investigate the nonlinear dynamics of the microbeam under a two-source harmonic excitation. The first-frequency source is swept around the first three modes of vibration, whereas the second source frequency remains fixed. New additive and subtractive resonances are demonstrated. We illustrated that by properly tuning the frequency and amplitude of the excitation force, the frequency bandwidth of the resonator is controlled. The microbeam is fabricated using polyimide as a structural layer coated with nickel from the top and chromium and gold layers from the bottom. Using the Galerkin method, a reduced order model is derived to simulate the static and dynamic response of the device. A good agreement between the theoretical and experimental data are reported.
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U2 - 10.1038/micronano.2016.2
DO - 10.1038/micronano.2016.2
M3 - Article
AN - SCOPUS:85013883269
VL - 2
JO - Microsystems and Nanoengineering
JF - Microsystems and Nanoengineering
SN - 2055-7434
M1 - 16002
ER -