Multipurpose sensor based on free-standing microthermopiles

Srinivas A. Tadigadapa, H. Ahmed

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

A sensor fabricated from microminiature free-standing structures which is capable of simultaneous measurements of several different inputs in real-time is described. The small thermal mass and good thermal isolation of free-standing structures have been used to advantage for sensing infrared radiation, ambient pressure and gas flow. The sensory element in all of these detectors is a microthermopile. The hot junctions of the device are made of free-standing wires whereas the cold junctions are thermally attached to the substrate. Energy dissipated in the microthermopile causes a rise in the temperature of the hot junctions relative to the cold junctions and thus produces a thermovoltage across the device. Monitoring the thermovoltage caused by the absorption of incident infrared radiation has resulted in a fast and sensitive thermal infrared detector which can be used for noncontact temperature measurements. For small temperature differences from ambient, the rise in the temperature of hot junctions is determined by the magnitudes of conductive and convection heat losses from the free- standing wires and therefore is a function of the ambient pressure, gas composition and gas flow. These dependencies have been used for sensing pressure, flow and gases. The sensors made from free-standing structures can be monolithically integrated into a sensor microsystem because the techniques used in their fabrication are compatible with silicon microfabrication technology. It should therefore be possible to integrate these sensors with active electronic circuits to make a smart microsystem.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsVijay K. Varadan
PublisherSociety of Photo-Optical Instrumentation Engineers
Pages2-8
Number of pages7
Volume2448
ISBN (Print)0819417971
StatePublished - 1995
EventSmart Structures and Materials 1995: Smart Electronics - San Diego, CA, USA
Duration: Mar 2 1995Mar 3 1995

Other

OtherSmart Structures and Materials 1995: Smart Electronics
CitySan Diego, CA, USA
Period3/2/953/3/95

Fingerprint

Infrared Radiation
Sensor
Microsystems
sensors
Sensors
Gas Flow
Flow of gases
infrared radiation
Sensing
Gases
Wire
gas flow
Non-contact Measurement
Infrared radiation
Microfabrication
Thermal Infrared
Infrared Detectors
Infrared detectors
wire
Temperature Measurement

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Tadigadapa, S. A., & Ahmed, H. (1995). Multipurpose sensor based on free-standing microthermopiles. In V. K. Varadan (Ed.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 2448, pp. 2-8). Society of Photo-Optical Instrumentation Engineers.
Tadigadapa, Srinivas A. ; Ahmed, H. / Multipurpose sensor based on free-standing microthermopiles. Proceedings of SPIE - The International Society for Optical Engineering. editor / Vijay K. Varadan. Vol. 2448 Society of Photo-Optical Instrumentation Engineers, 1995. pp. 2-8
@inproceedings{8d7f5ad897c24f2b8703f81ad899ec6b,
title = "Multipurpose sensor based on free-standing microthermopiles",
abstract = "A sensor fabricated from microminiature free-standing structures which is capable of simultaneous measurements of several different inputs in real-time is described. The small thermal mass and good thermal isolation of free-standing structures have been used to advantage for sensing infrared radiation, ambient pressure and gas flow. The sensory element in all of these detectors is a microthermopile. The hot junctions of the device are made of free-standing wires whereas the cold junctions are thermally attached to the substrate. Energy dissipated in the microthermopile causes a rise in the temperature of the hot junctions relative to the cold junctions and thus produces a thermovoltage across the device. Monitoring the thermovoltage caused by the absorption of incident infrared radiation has resulted in a fast and sensitive thermal infrared detector which can be used for noncontact temperature measurements. For small temperature differences from ambient, the rise in the temperature of hot junctions is determined by the magnitudes of conductive and convection heat losses from the free- standing wires and therefore is a function of the ambient pressure, gas composition and gas flow. These dependencies have been used for sensing pressure, flow and gases. The sensors made from free-standing structures can be monolithically integrated into a sensor microsystem because the techniques used in their fabrication are compatible with silicon microfabrication technology. It should therefore be possible to integrate these sensors with active electronic circuits to make a smart microsystem.",
author = "Tadigadapa, {Srinivas A.} and H. Ahmed",
year = "1995",
language = "English (US)",
isbn = "0819417971",
volume = "2448",
pages = "2--8",
editor = "Varadan, {Vijay K.}",
booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "Society of Photo-Optical Instrumentation Engineers",

}

Tadigadapa, SA & Ahmed, H 1995, Multipurpose sensor based on free-standing microthermopiles. in VK Varadan (ed.), Proceedings of SPIE - The International Society for Optical Engineering. vol. 2448, Society of Photo-Optical Instrumentation Engineers, pp. 2-8, Smart Structures and Materials 1995: Smart Electronics, San Diego, CA, USA, 3/2/95.

Multipurpose sensor based on free-standing microthermopiles. / Tadigadapa, Srinivas A.; Ahmed, H.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / Vijay K. Varadan. Vol. 2448 Society of Photo-Optical Instrumentation Engineers, 1995. p. 2-8.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Multipurpose sensor based on free-standing microthermopiles

AU - Tadigadapa, Srinivas A.

AU - Ahmed, H.

PY - 1995

Y1 - 1995

N2 - A sensor fabricated from microminiature free-standing structures which is capable of simultaneous measurements of several different inputs in real-time is described. The small thermal mass and good thermal isolation of free-standing structures have been used to advantage for sensing infrared radiation, ambient pressure and gas flow. The sensory element in all of these detectors is a microthermopile. The hot junctions of the device are made of free-standing wires whereas the cold junctions are thermally attached to the substrate. Energy dissipated in the microthermopile causes a rise in the temperature of the hot junctions relative to the cold junctions and thus produces a thermovoltage across the device. Monitoring the thermovoltage caused by the absorption of incident infrared radiation has resulted in a fast and sensitive thermal infrared detector which can be used for noncontact temperature measurements. For small temperature differences from ambient, the rise in the temperature of hot junctions is determined by the magnitudes of conductive and convection heat losses from the free- standing wires and therefore is a function of the ambient pressure, gas composition and gas flow. These dependencies have been used for sensing pressure, flow and gases. The sensors made from free-standing structures can be monolithically integrated into a sensor microsystem because the techniques used in their fabrication are compatible with silicon microfabrication technology. It should therefore be possible to integrate these sensors with active electronic circuits to make a smart microsystem.

AB - A sensor fabricated from microminiature free-standing structures which is capable of simultaneous measurements of several different inputs in real-time is described. The small thermal mass and good thermal isolation of free-standing structures have been used to advantage for sensing infrared radiation, ambient pressure and gas flow. The sensory element in all of these detectors is a microthermopile. The hot junctions of the device are made of free-standing wires whereas the cold junctions are thermally attached to the substrate. Energy dissipated in the microthermopile causes a rise in the temperature of the hot junctions relative to the cold junctions and thus produces a thermovoltage across the device. Monitoring the thermovoltage caused by the absorption of incident infrared radiation has resulted in a fast and sensitive thermal infrared detector which can be used for noncontact temperature measurements. For small temperature differences from ambient, the rise in the temperature of hot junctions is determined by the magnitudes of conductive and convection heat losses from the free- standing wires and therefore is a function of the ambient pressure, gas composition and gas flow. These dependencies have been used for sensing pressure, flow and gases. The sensors made from free-standing structures can be monolithically integrated into a sensor microsystem because the techniques used in their fabrication are compatible with silicon microfabrication technology. It should therefore be possible to integrate these sensors with active electronic circuits to make a smart microsystem.

UR - http://www.scopus.com/inward/record.url?scp=0029237381&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0029237381&partnerID=8YFLogxK

M3 - Conference contribution

SN - 0819417971

VL - 2448

SP - 2

EP - 8

BT - Proceedings of SPIE - The International Society for Optical Engineering

A2 - Varadan, Vijay K.

PB - Society of Photo-Optical Instrumentation Engineers

ER -

Tadigadapa SA, Ahmed H. Multipurpose sensor based on free-standing microthermopiles. In Varadan VK, editor, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 2448. Society of Photo-Optical Instrumentation Engineers. 1995. p. 2-8