Nanometer-level comparison of three spindle error motion separation techniques

Eric Marsh, Jeremiah Couey, Ryan Vallance

Research output: Contribution to journalArticle

50 Citations (Scopus)

Abstract

This work demonstrates the state of the art capabilities of three error separation techniques for nanometer-level measurement of precision spindles and rotationally-symmetric artifacts. Donaldson reversal is compared to a multi-probe and a multi-step technique using a series of measurements carried out on a precision aerostatic spindle with a lapped spherical artifact. The results indicate that subnanometer features in both spindle error motion and artifact form are reliably resolved by all three techniques. Furthermore, the numerical error values agree to better than one nanometer. The paper discusses several issues that must be considered when planning spindle or artifact measurements at the nanometer level.

Original languageEnglish (US)
Pages (from-to)180-187
Number of pages8
JournalJournal of Manufacturing Science and Engineering, Transactions of the ASME
Volume128
Issue number1
DOIs
StatePublished - Feb 1 2006

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All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Mechanical Engineering
  • Computer Science Applications
  • Industrial and Manufacturing Engineering

Cite this

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Nanometer-level comparison of three spindle error motion separation techniques. / Marsh, Eric; Couey, Jeremiah; Vallance, Ryan.

In: Journal of Manufacturing Science and Engineering, Transactions of the ASME, Vol. 128, No. 1, 01.02.2006, p. 180-187.

Research output: Contribution to journalArticle

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