Nanometer-level spindle metrology in a production environment

Byron R. Knapp, Eric R. Marsh, David A. Arneson, Donald L. Martin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper demonstrates precision spindle metrology in a production environment through the application of two methods of separating residual synchronous spindle face error motion from artifact circular flatness. Face error measurement results obtained using Estler's face error reversal and multiprobe face error separation are demonstrated for an ultra-precision air bearing spindle produced for diamond-turning applications. It is demonstrated that the tilt error motion obtained via radial error measurements agree with tilt error motion obtained via face measurements. Although the theory and application of spindle metrology is widely known, there are problems with inadequate hardware design (when testing at high speed), data acquisition, data analysis, and environmental control. This work documents the implementation of test hardware and analysis software to measure nanometer-level error motions in a production environment.

Original languageEnglish (US)
Title of host publicationProceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009
EditorsHendrik Van Brussel, Theresa Burke, H. Spaan, E. Brinksmeier, Theresa Burke, Theresa Burke
Publishereuspen
Pages348-351
Number of pages4
ISBN (Electronic)9780955308260
StatePublished - Jan 1 2009
Event9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009 - San Sebastian, Spain
Duration: Jun 2 2009Jun 5 2009

Publication series

NameProceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009
Volume2

Other

Other9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009
CountrySpain
CitySan Sebastian
Period6/2/096/5/09

All Science Journal Classification (ASJC) codes

  • Industrial and Manufacturing Engineering
  • Instrumentation
  • Mechanical Engineering
  • Materials Science(all)
  • Environmental Engineering

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