Nanoparticles and nanocomposites in rf plasma

Research output: Contribution to journalConference article

5 Citations (Scopus)

Abstract

The use of low pressure radio-frequency (rf) plasma for nanoparticle formation and the deposition of thin film on particulate substrates are reported. Plasma polymer particles are synthesized in a capacitively-coupled Ar/monomer discharge at rf power of 15-30 W. A variety of particle structures are observed, including monodispersed nanospheres and liquid-like viscous nano-droplets. Styrene in particular is observed to produce hollow nanospheres. By manipulating the process parameters, films of plasma polymers can be deposited onto suspended submicron particles. We take advantage of the electrostatic trapping of "dusty plasma" to suspend small particles in plasma for extended periods of time until the desired coating thickness is achieved. Sub-micron silica particles introduced into a low pressure rf Ar/monomer plasma are coated with film of thickness ranging from 2 to 70 nm.

Original languageEnglish (US)
JournalMaterials Research Society Symposium - Proceedings
Volume635
StatePublished - Jan 1 2001

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Nanocomposites
radio frequencies
nanocomposites
Nanoparticles
Plasmas
nanoparticles
Nanospheres
low pressure
monomers
Polymers
Monomers
dusty plasmas
polymers
Styrene
styrenes
particulates
hollow
Silicon Dioxide
trapping
Electrostatics

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

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title = "Nanoparticles and nanocomposites in rf plasma",
abstract = "The use of low pressure radio-frequency (rf) plasma for nanoparticle formation and the deposition of thin film on particulate substrates are reported. Plasma polymer particles are synthesized in a capacitively-coupled Ar/monomer discharge at rf power of 15-30 W. A variety of particle structures are observed, including monodispersed nanospheres and liquid-like viscous nano-droplets. Styrene in particular is observed to produce hollow nanospheres. By manipulating the process parameters, films of plasma polymers can be deposited onto suspended submicron particles. We take advantage of the electrostatic trapping of {"}dusty plasma{"} to suspend small particles in plasma for extended periods of time until the desired coating thickness is achieved. Sub-micron silica particles introduced into a low pressure rf Ar/monomer plasma are coated with film of thickness ranging from 2 to 70 nm.",
author = "J. Cao and Themis Matsoukas",
year = "2001",
month = "1",
day = "1",
language = "English (US)",
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issn = "0272-9172",
publisher = "Materials Research Society",

}

Nanoparticles and nanocomposites in rf plasma. / Cao, J.; Matsoukas, Themis.

In: Materials Research Society Symposium - Proceedings, Vol. 635, 01.01.2001.

Research output: Contribution to journalConference article

TY - JOUR

T1 - Nanoparticles and nanocomposites in rf plasma

AU - Cao, J.

AU - Matsoukas, Themis

PY - 2001/1/1

Y1 - 2001/1/1

N2 - The use of low pressure radio-frequency (rf) plasma for nanoparticle formation and the deposition of thin film on particulate substrates are reported. Plasma polymer particles are synthesized in a capacitively-coupled Ar/monomer discharge at rf power of 15-30 W. A variety of particle structures are observed, including monodispersed nanospheres and liquid-like viscous nano-droplets. Styrene in particular is observed to produce hollow nanospheres. By manipulating the process parameters, films of plasma polymers can be deposited onto suspended submicron particles. We take advantage of the electrostatic trapping of "dusty plasma" to suspend small particles in plasma for extended periods of time until the desired coating thickness is achieved. Sub-micron silica particles introduced into a low pressure rf Ar/monomer plasma are coated with film of thickness ranging from 2 to 70 nm.

AB - The use of low pressure radio-frequency (rf) plasma for nanoparticle formation and the deposition of thin film on particulate substrates are reported. Plasma polymer particles are synthesized in a capacitively-coupled Ar/monomer discharge at rf power of 15-30 W. A variety of particle structures are observed, including monodispersed nanospheres and liquid-like viscous nano-droplets. Styrene in particular is observed to produce hollow nanospheres. By manipulating the process parameters, films of plasma polymers can be deposited onto suspended submicron particles. We take advantage of the electrostatic trapping of "dusty plasma" to suspend small particles in plasma for extended periods of time until the desired coating thickness is achieved. Sub-micron silica particles introduced into a low pressure rf Ar/monomer plasma are coated with film of thickness ranging from 2 to 70 nm.

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M3 - Conference article

VL - 635

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

SN - 0272-9172

ER -