Nanosize Silicon Whiskers Produced by Chemical Vapor Deposition: Active Getters for NF3

Lu Sheri, Youming Xiao, Elizabeth Vileno, Ying Ma, Steven L. Suib, Francis S. Galasso, Janies D. Freihaut, Steven J. Hardwick

Research output: Contribution to journalArticlepeer-review

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Chemical Compounds

Engineering & Materials Science