Nanostructured material sensor processing using microfabrication techniques

Gary Hunter, Randy Lee Vander Wal, Laura Evans, Jennifer Xu, Gordon Berger, Michael Kullis, Azlin Biaggi-Labiosa

Research output: Contribution to journalReview article

2 Scopus citations

Abstract

Purpose - The development of chemical sensors based on nanostructures, such as nanotubes or nanowires, depends on the capability to reproducibly control the processing of the sensor. Alignment and consistent electrical contact of nanostructures on a microsensor platform is challenging. This can be accomplished using labor-intensive approaches, specialized processing technology, or growth of nanostructures in situ. However, the use of standard microfabrication techniques for fabricating nanostructured microsensors is problematic. The purpose of this paper is to address this challenge using standard photoresist processing combined with dielectrophoresis. Design/methodology/approach - Nanostructures are suspended in photoresist and aligned between opposing sawtooth electrode patterns using an alternating current (AC) electric field (dielectrophoresis). The use of photoresist processing techniques allow the burying of the nanostructures between layers of metal, thus improving the electrical contact of the nanostructures to the microsensor platform. Findings - This approach is demonstrated for both multi-walled carbon nanotubes and tin oxide nanowires. Preliminary data show the electrical continuity of the sensor structure as well as the response to various gases. Research limitations/implications - It is concluded that this approach demonstrates a foundation for a new tool for the fabrication of microsensors using nanostructures, and can be expanded towards enabling the combination of common microfabrication techniques with nanostructured sensor development. Originality/value - This approach is intended to address the significant barriers of deposition control, contact robustness, and simplified processing to realizing the potential of nanotechnology as applied to sensors.

Original languageEnglish (US)
Pages (from-to)106-117
Number of pages12
JournalSensor Review
Volume32
Issue number2
DOIs
StatePublished - Mar 30 2012

All Science Journal Classification (ASJC) codes

  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'Nanostructured material sensor processing using microfabrication techniques'. Together they form a unique fingerprint.

  • Cite this

    Hunter, G., Vander Wal, R. L., Evans, L., Xu, J., Berger, G., Kullis, M., & Biaggi-Labiosa, A. (2012). Nanostructured material sensor processing using microfabrication techniques. Sensor Review, 32(2), 106-117. https://doi.org/10.1108/02602281211209392