Nanostructured silicon for bio-medical applications

S. J. Fonash, J. Cuiffi, Daniel J. Hayes, W. J. Nam, S. Bae, H. Li, A. K. Kalkan

Research output: Contribution to journalConference article

2 Citations (Scopus)

Abstract

We have developed a process for fabricating reproducible nanostructured silicon materials at low temperatures (<100C) using high density plasma chemical vapor deposition. These films have a column/void network morphology and they can be deposited on glass, on plastics, on metal foils, or even on substrates with previously existing, completed structures or circuits. The films have absorption properties that qualify them for the description "molecular Velcro™ ". In addition their optical properties can be tailored and they can have very low reflectance with high absorption in the UV. These films can easily be chemically modified and functionalized. In this report we discuss the deposition and morphology of these films. We also outline several bio-medical applications: substrates for cell growth, substrates for mass analysis for proteomics, and sacrificial layer applications for nano-and micro-channel and reaction chamber formation.

Original languageEnglish (US)
Pages (from-to)280-285
Number of pages6
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4236
DOIs
StatePublished - Jan 1 2001
EventSmart Electronics and MEMS II - Melbourne, VIC, Australia
Duration: Dec 13 2000Dec 15 2000

Fingerprint

Biomedical Applications
Medical applications
Silicon
Substrate
silicon
Substrates
Absorption
metal foils
Chemical Vapor Deposition
Plasma density
Microchannel
Proteomics
Cell growth
Voids
Reflectance
Optical Properties
Metal foil
plasma density
voids
Chemical vapor deposition

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Fonash, S. J. ; Cuiffi, J. ; Hayes, Daniel J. ; Nam, W. J. ; Bae, S. ; Li, H. ; Kalkan, A. K. / Nanostructured silicon for bio-medical applications. In: Proceedings of SPIE - The International Society for Optical Engineering. 2001 ; Vol. 4236. pp. 280-285.
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Nanostructured silicon for bio-medical applications. / Fonash, S. J.; Cuiffi, J.; Hayes, Daniel J.; Nam, W. J.; Bae, S.; Li, H.; Kalkan, A. K.

In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 4236, 01.01.2001, p. 280-285.

Research output: Contribution to journalConference article

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T1 - Nanostructured silicon for bio-medical applications

AU - Fonash, S. J.

AU - Cuiffi, J.

AU - Hayes, Daniel J.

AU - Nam, W. J.

AU - Bae, S.

AU - Li, H.

AU - Kalkan, A. K.

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