Nanotribology and MEMS

Seong Kim, David B. Asay, Michael T. Dugger

Research output: Contribution to journalReview article

266 Citations (Scopus)

Abstract

The tribological phenomena of adhesion, friction, and wear arise when solid objects make contact. As the size of devices shrinks to micro- and nanoscales, the surface-to-volume ratio increases and the effects of body forces (gravity and inertia) become insignificant compared with those of surface forces (van der Waals, capillary, electrostatic, and chemical bonding). In microelectromechanical systems (MEMS), tribological and static interfacial forces are comparable with forces driving device motion. In this situation, macroscale lubrication and wear mitigation methods, such as the use of bulk fluids and micrometer thick coatings, are ineffective; new nano-engineering approaches must be employed for MEMS devices with moving structures. We review fundamental tribological problems related to micro- and nanoscale mechanical contacts and developments in MEMS lubrications.

Original languageEnglish (US)
Pages (from-to)22-29
Number of pages8
JournalNano Today
Volume2
Issue number5
DOIs
StatePublished - Oct 1 2007

Fingerprint

Nanotribology
MEMS
Lubrication
Equipment and Supplies
Wear of materials
Van der Waals forces
Surface Tension
Friction
Gravitation
Static Electricity
Electrostatics
Adhesion
Coatings
Fluids

All Science Journal Classification (ASJC) codes

  • Biotechnology
  • Materials Science(all)

Cite this

Kim, S., Asay, D. B., & Dugger, M. T. (2007). Nanotribology and MEMS. Nano Today, 2(5), 22-29. https://doi.org/10.1016/S1748-0132(07)70140-8
Kim, Seong ; Asay, David B. ; Dugger, Michael T. / Nanotribology and MEMS. In: Nano Today. 2007 ; Vol. 2, No. 5. pp. 22-29.
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Kim, S, Asay, DB & Dugger, MT 2007, 'Nanotribology and MEMS', Nano Today, vol. 2, no. 5, pp. 22-29. https://doi.org/10.1016/S1748-0132(07)70140-8

Nanotribology and MEMS. / Kim, Seong; Asay, David B.; Dugger, Michael T.

In: Nano Today, Vol. 2, No. 5, 01.10.2007, p. 22-29.

Research output: Contribution to journalReview article

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AB - The tribological phenomena of adhesion, friction, and wear arise when solid objects make contact. As the size of devices shrinks to micro- and nanoscales, the surface-to-volume ratio increases and the effects of body forces (gravity and inertia) become insignificant compared with those of surface forces (van der Waals, capillary, electrostatic, and chemical bonding). In microelectromechanical systems (MEMS), tribological and static interfacial forces are comparable with forces driving device motion. In this situation, macroscale lubrication and wear mitigation methods, such as the use of bulk fluids and micrometer thick coatings, are ineffective; new nano-engineering approaches must be employed for MEMS devices with moving structures. We review fundamental tribological problems related to micro- and nanoscale mechanical contacts and developments in MEMS lubrications.

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