Nanotube MEMS: Modeling extreme nanoscale devices

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations

Abstract

The physics of operation of nanotube NEMS devices is reviewed. Special attention is paid to non-classical effects, rarely described in MEMS analysis, such as van derWaals/Casimir interactions, quantum effects in electrostatics, atomistic parameterization of elasticity. As an example of a breakdown of a classical MEMS theory, the NEMS scaling limitation is derived in a lump model taking into account van der Waals/Casimir attraction.

Original languageEnglish (US)
Title of host publicationMicro- and Nanotechnology Sensors, Systems, and Applications
DOIs
StatePublished - Sep 7 2009
EventMicro- and Nanotechnology Sensors, Systems, and Applications - Orlando, FL, United States
Duration: Apr 15 2009Apr 17 2009

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume7318
ISSN (Print)0277-786X

Other

OtherMicro- and Nanotechnology Sensors, Systems, and Applications
CountryUnited States
CityOrlando, FL
Period4/15/094/17/09

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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