TY - JOUR
T1 - Neutron depth profiling at the University of Texas
AU - Ünlü, Kenan
AU - Wehring, Bernard W.
PY - 1994/12/30
Y1 - 1994/12/30
N2 - A Neutron Depth Profiling (NDP) facility has been developed at The University of Texas at Austin (UT) Nuclear Engineering Teaching Laboratory. Thermal neutrons from the tangential beam port of the UT 1-MW TRIGA Mark II research reactor are utilized. The UT-NDP facility consists of a neutron beam collimator, target chamber, beam catcher, and necessary data acquisition and process electronics. The collimator was designed to achieve a high quality thermal neutron beam with good intensity and minimum contamination of neutrons above thermal energies. A target chamber for NDP was constructed from 40.6 cm diameter aluminum tubing. The chamber can accommodate several small samples as well as a single large sample with a diameter up to 30.5 cm. Depth profiles for borophosphosilicate glass films on silicon wafers were measured using the UT-NDP facility. Other potential applications of the UT-NDP facility include the study of implanted boron in semiconductor material; study of nitrogen in metals; and study of helium behavior in metals, and metallic and amorphous alloys.
AB - A Neutron Depth Profiling (NDP) facility has been developed at The University of Texas at Austin (UT) Nuclear Engineering Teaching Laboratory. Thermal neutrons from the tangential beam port of the UT 1-MW TRIGA Mark II research reactor are utilized. The UT-NDP facility consists of a neutron beam collimator, target chamber, beam catcher, and necessary data acquisition and process electronics. The collimator was designed to achieve a high quality thermal neutron beam with good intensity and minimum contamination of neutrons above thermal energies. A target chamber for NDP was constructed from 40.6 cm diameter aluminum tubing. The chamber can accommodate several small samples as well as a single large sample with a diameter up to 30.5 cm. Depth profiles for borophosphosilicate glass films on silicon wafers were measured using the UT-NDP facility. Other potential applications of the UT-NDP facility include the study of implanted boron in semiconductor material; study of nitrogen in metals; and study of helium behavior in metals, and metallic and amorphous alloys.
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U2 - 10.1016/0168-9002(94)91685-3
DO - 10.1016/0168-9002(94)91685-3
M3 - Article
AN - SCOPUS:26844511914
VL - 353
SP - 402
EP - 405
JO - Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
JF - Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
SN - 0168-9002
IS - 1-3
ER -