New materials for uncooled IR imaging: Nickel manganite thin films grown by spin spray

Song Won Ko, Jing Li, Myung Yoon Lee, Elizabeth Dickey, Thomas Nelson Jackson, Susan E. Trolier-McKinstry

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

Ceramic thermistors like VOx, amorphous Si, and NiMn 2O4 are used for thermal sensing applications such as microbolometers and infrared sensors. These materials should have large temperature coefficient of resistance (TCR), high sensitivity, and low noise for these applications. Nickel manganite films have large TCR (>-3%/K) and good environmental stability, so that the properties are robust during subsequent processing. To improve the ability to prepare manganite spinels on pre-existing circuitry, new techniques that enable low-temperature depositions need to be developed. To address this, the spin spray technique was adopted in this work; this approach is both low cost and permits low process temperatures (<100°C). Spin spray deposition is accomplished using two dilute water-based solutions: a reaction solution and oxidizing solution. The reaction solution consists of metal salts like nickel chloride and manganese chloride while the oxidizing solution contains pH buffer, pH adjuster, and oxidizing agent. To grow films, the solution was nebulized by a nitrogen carrier gas and sprayed onto a rotating silicon substrate with a 1μm thick SiO2 buffer layer. As-deposited nickel manganite films were identified as nanocrystalline spinel by TEM analysis. The TCR values of nickel manganite film and nickel copper manganite film were about -3.6 %/K and -2.9 %/K respectively. Adding Cu allowed the electric resistivity to be tuned to less than 1000 Ω-cm. The normalized Hooge parameter was around 1.7x10-21 cm3.

Original languageEnglish (US)
Title of host publicationInfrared Technology and Applications XXXVII
DOIs
StatePublished - Sep 26 2011
EventInfrared Technology and Applications XXXVII - Orlando, FL, United States
Duration: Apr 25 2011Apr 29 2011

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume8012
ISSN (Print)0277-786X

Other

OtherInfrared Technology and Applications XXXVII
CountryUnited States
CityOrlando, FL
Period4/25/114/29/11

Fingerprint

Spray
Infrared imaging
Nickel
sprayers
Thin Films
Imaging
nickel
Thin films
thin films
Buffer
Coefficient
Thermistor
coefficients
Temperature
Microbolometer
buffers
Infrared Sensor
chlorides
Manganese
SiO2

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Ko, S. W., Li, J., Lee, M. Y., Dickey, E., Jackson, T. N., & Trolier-McKinstry, S. E. (2011). New materials for uncooled IR imaging: Nickel manganite thin films grown by spin spray. In Infrared Technology and Applications XXXVII [1] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8012). https://doi.org/10.1117/12.884636
Ko, Song Won ; Li, Jing ; Lee, Myung Yoon ; Dickey, Elizabeth ; Jackson, Thomas Nelson ; Trolier-McKinstry, Susan E. / New materials for uncooled IR imaging : Nickel manganite thin films grown by spin spray. Infrared Technology and Applications XXXVII. 2011. (Proceedings of SPIE - The International Society for Optical Engineering).
@inproceedings{289df719895b4d3b994ad5d5a7a92f5d,
title = "New materials for uncooled IR imaging: Nickel manganite thin films grown by spin spray",
abstract = "Ceramic thermistors like VOx, amorphous Si, and NiMn 2O4 are used for thermal sensing applications such as microbolometers and infrared sensors. These materials should have large temperature coefficient of resistance (TCR), high sensitivity, and low noise for these applications. Nickel manganite films have large TCR (>-3{\%}/K) and good environmental stability, so that the properties are robust during subsequent processing. To improve the ability to prepare manganite spinels on pre-existing circuitry, new techniques that enable low-temperature depositions need to be developed. To address this, the spin spray technique was adopted in this work; this approach is both low cost and permits low process temperatures (<100°C). Spin spray deposition is accomplished using two dilute water-based solutions: a reaction solution and oxidizing solution. The reaction solution consists of metal salts like nickel chloride and manganese chloride while the oxidizing solution contains pH buffer, pH adjuster, and oxidizing agent. To grow films, the solution was nebulized by a nitrogen carrier gas and sprayed onto a rotating silicon substrate with a 1μm thick SiO2 buffer layer. As-deposited nickel manganite films were identified as nanocrystalline spinel by TEM analysis. The TCR values of nickel manganite film and nickel copper manganite film were about -3.6 {\%}/K and -2.9 {\%}/K respectively. Adding Cu allowed the electric resistivity to be tuned to less than 1000 Ω-cm. The normalized Hooge parameter was around 1.7x10-21 cm3.",
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Ko, SW, Li, J, Lee, MY, Dickey, E, Jackson, TN & Trolier-McKinstry, SE 2011, New materials for uncooled IR imaging: Nickel manganite thin films grown by spin spray. in Infrared Technology and Applications XXXVII., 1, Proceedings of SPIE - The International Society for Optical Engineering, vol. 8012, Infrared Technology and Applications XXXVII, Orlando, FL, United States, 4/25/11. https://doi.org/10.1117/12.884636

New materials for uncooled IR imaging : Nickel manganite thin films grown by spin spray. / Ko, Song Won; Li, Jing; Lee, Myung Yoon; Dickey, Elizabeth; Jackson, Thomas Nelson; Trolier-McKinstry, Susan E.

Infrared Technology and Applications XXXVII. 2011. 1 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8012).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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N2 - Ceramic thermistors like VOx, amorphous Si, and NiMn 2O4 are used for thermal sensing applications such as microbolometers and infrared sensors. These materials should have large temperature coefficient of resistance (TCR), high sensitivity, and low noise for these applications. Nickel manganite films have large TCR (>-3%/K) and good environmental stability, so that the properties are robust during subsequent processing. To improve the ability to prepare manganite spinels on pre-existing circuitry, new techniques that enable low-temperature depositions need to be developed. To address this, the spin spray technique was adopted in this work; this approach is both low cost and permits low process temperatures (<100°C). Spin spray deposition is accomplished using two dilute water-based solutions: a reaction solution and oxidizing solution. The reaction solution consists of metal salts like nickel chloride and manganese chloride while the oxidizing solution contains pH buffer, pH adjuster, and oxidizing agent. To grow films, the solution was nebulized by a nitrogen carrier gas and sprayed onto a rotating silicon substrate with a 1μm thick SiO2 buffer layer. As-deposited nickel manganite films were identified as nanocrystalline spinel by TEM analysis. The TCR values of nickel manganite film and nickel copper manganite film were about -3.6 %/K and -2.9 %/K respectively. Adding Cu allowed the electric resistivity to be tuned to less than 1000 Ω-cm. The normalized Hooge parameter was around 1.7x10-21 cm3.

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Ko SW, Li J, Lee MY, Dickey E, Jackson TN, Trolier-McKinstry SE. New materials for uncooled IR imaging: Nickel manganite thin films grown by spin spray. In Infrared Technology and Applications XXXVII. 2011. 1. (Proceedings of SPIE - The International Society for Optical Engineering). https://doi.org/10.1117/12.884636