NITRIDATION OF SILICA SOL-GEL THIN FILMS.

C. G. Pantano, P. M. Glaser, D. J. Armbrust

Research output: Chapter in Book/Report/Conference proceedingConference contribution

10 Scopus citations

Abstract

The nitridation of silica sol-gel films on silicon is discussed. The films were prepared using an acid-catalyzed solution of silicon alkoxide and water. A gel that is not highly condensed, and that possesses a fine pore microstructure, is produced under these conditions. Thus, the dried gel films used in this study were especially reactive and capable of densification at relatively low temperatures. The densification and refractive index of the films treated in nitrogen and ammonia were examined as a function of temperature.

Original languageEnglish (US)
Title of host publicationUnknown Host Publication Title
EditorsLarry L. Hench, Donald R. Ulrich
PublisherJohn Wiley & Sons
Pages161-177
Number of pages17
ISBN (Print)0471896691
StatePublished - 1984

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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  • Cite this

    Pantano, C. G., Glaser, P. M., & Armbrust, D. J. (1984). NITRIDATION OF SILICA SOL-GEL THIN FILMS. In L. L. Hench, & D. R. Ulrich (Eds.), Unknown Host Publication Title (pp. 161-177). John Wiley & Sons.