NITRIDATION OF SILICA SOL-GEL THIN FILMS.

C. G. Pantano, P. M. Glaser, D. J. Armbrust

Research output: Chapter in Book/Report/Conference proceedingConference contribution

10 Citations (Scopus)

Abstract

The nitridation of silica sol-gel films on silicon is discussed. The films were prepared using an acid-catalyzed solution of silicon alkoxide and water. A gel that is not highly condensed, and that possesses a fine pore microstructure, is produced under these conditions. Thus, the dried gel films used in this study were especially reactive and capable of densification at relatively low temperatures. The densification and refractive index of the films treated in nitrogen and ammonia were examined as a function of temperature.

Original languageEnglish (US)
Title of host publicationUnknown Host Publication Title
EditorsLarry L. Hench, Donald R. Ulrich
PublisherJohn Wiley & Sons
Pages161-177
Number of pages17
ISBN (Print)0471896691
StatePublished - 1984

Fingerprint

Nitridation
Sol-gels
Silica
Thin films
Densification
Gels
Silicon
Ammonia
Refractive index
Nitrogen
Temperature
Microstructure
Acids
Water

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Pantano, C. G., Glaser, P. M., & Armbrust, D. J. (1984). NITRIDATION OF SILICA SOL-GEL THIN FILMS. In L. L. Hench, & D. R. Ulrich (Eds.), Unknown Host Publication Title (pp. 161-177). John Wiley & Sons.
Pantano, C. G. ; Glaser, P. M. ; Armbrust, D. J. / NITRIDATION OF SILICA SOL-GEL THIN FILMS. Unknown Host Publication Title. editor / Larry L. Hench ; Donald R. Ulrich. John Wiley & Sons, 1984. pp. 161-177
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Pantano, CG, Glaser, PM & Armbrust, DJ 1984, NITRIDATION OF SILICA SOL-GEL THIN FILMS. in LL Hench & DR Ulrich (eds), Unknown Host Publication Title. John Wiley & Sons, pp. 161-177.

NITRIDATION OF SILICA SOL-GEL THIN FILMS. / Pantano, C. G.; Glaser, P. M.; Armbrust, D. J.

Unknown Host Publication Title. ed. / Larry L. Hench; Donald R. Ulrich. John Wiley & Sons, 1984. p. 161-177.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Pantano CG, Glaser PM, Armbrust DJ. NITRIDATION OF SILICA SOL-GEL THIN FILMS. In Hench LL, Ulrich DR, editors, Unknown Host Publication Title. John Wiley & Sons. 1984. p. 161-177