The nitridation of silica sol-gel films on silicon is discussed. The films were prepared using an acid-catalyzed solution of silicon alkoxide and water. A gel that is not highly condensed, and that possesses a fine pore microstructure, is produced under these conditions. Thus, the dried gel films used in this study were especially reactive and capable of densification at relatively low temperatures. The densification and refractive index of the films treated in nitrogen and ammonia were examined as a function of temperature.
|Original language||English (US)|
|Title of host publication||Unknown Host Publication Title|
|Editors||Larry L. Hench, Donald R. Ulrich|
|Publisher||John Wiley & Sons|
|Number of pages||17|
|State||Published - 1984|
All Science Journal Classification (ASJC) codes