Novel interdigital actuators and sensors based on highly overlapped branched carbon nanotubes

S. Darbari, Y. Abdi, A. Ebrahimi, S. Mohajerzadeh

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We report a novel interdigital sensor and actuator device based on branched treelike carbon nanotubes (CNT) on silicon-based membranes with an ultra high capacitance value. The presence of treelike CNTs leads to a high overlap between interdigital fingers as well as high electron emission thanks to many nanometric branches attached to their central stem. The fabricated B-CNT-based device resulted in a high capacitance value in comparison to typical devices, leading to a stronger electromechanical coupling behavior. The electro-mechanical behavior of the device has been investigated both with electron emission and capacitive characteristic of the sensor, which confirm superior performance of the investigated devices over silicon-based devices.

Original languageEnglish (US)
Title of host publicationNanotechnology 2010
Subtitle of host publicationAdvanced Materials, CNTs, Particles, Films and Composites - Technical Proceedings of the 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010
Pages308-311
Number of pages4
StatePublished - Nov 9 2010
EventNanotechnology 2010: Advanced Materials, CNTs, Particles, Films and Composites - 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010 - Anaheim, CA, United States
Duration: Jun 21 2010Jun 24 2010

Publication series

NameNanotechnology 2010: Advanced Materials, CNTs, Particles, Films and Composites - Technical Proceedings of the 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010
Volume1

Other

OtherNanotechnology 2010: Advanced Materials, CNTs, Particles, Films and Composites - 2010 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2010
CountryUnited States
CityAnaheim, CA
Period6/21/106/24/10

All Science Journal Classification (ASJC) codes

  • Ceramics and Composites
  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

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