Novel techniques for selective diamond growth on various substrates

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Abstract

There is a need for selective diamond growth in microelectronic and tool industries. This research was di-rected towards novel approaches in the selective diamond growth on non- diamond substrates. Diamond film was selectively deposited on the copper substrate by laser- hydrocarbon liquid (benzene C6H6) inter-action at room temperature which was used as seed for subsequent growth of diamond by the hot filament chemical vapor deposition (HFCVD). Diamond was also selectively grown on the gold patterned alumina substrate by manipulating HFCVD processing conditions. Diamond was selectively grown on the pat-terned silicon wafer (without having any scratches).

Original languageEnglish (US)
Pages (from-to)378-385
Number of pages8
JournalJournal of Materials Engineering and Performance
Volume3
Issue number3
DOIs
StatePublished - Jan 1 1994

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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