Nucleation-based control of low-temperature diamond film deposition on optical substrates

Donald R. Gilbert, Melanie L. Carasso, Paul A. Demkowicz, Rajiv K. Singh, James Hansell Adair

Research output: Contribution to journalConference article

1 Scopus citations

Abstract

Microstructural control is a critical issue in the use of diamond films in a variety of engineering applications. Using a novel, electrostatic-based particle seeding process, we have investigated the deposition of diamond films with varying areal nucleation densities. Depositions were performed at 1.000 Torr in a modified electron cyclotron resonance plasma system. Methyl alcohol was the primary diamond precursor species. SEM and Raman spectroscopy were used to evaluate microstructure and composition characteristics. Comparisons in deposition characteristics were made based on relative nucleation density.

Original languageEnglish (US)
Pages (from-to)367-371
Number of pages5
JournalMaterials Research Society Symposium - Proceedings
Volume472
StatePublished - Dec 1 1997
EventProceedings of the 1997 MRS Spring Symposium - San Francisco, CA, USA
Duration: Mar 31 1997Apr 3 1997

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All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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