Numerical study of a single blade row in turbomolecular pump

Sheng Wang, Hisashi Ninokata, Elia Merzari, Kangbin Lei, Xilian Luo, Luyi Lu, Kiwamu Kase

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Abstract

Research on turbomolecular pumps (TMPs) based on the analysis of single blade row has been carried out by a number of investigators Kruger CH, Ph.D. Thesis, Massachusetts Institute of Technology; 1960; Katsimichas S, Goddard AJH, Lewington R, Oliveira de CRE. J Vac Sci Technol A 1995;13:2954; Schneider TN, Katsimichas S, de Oliveira CRE, Goddard AJH. J Vac Sci Technol A 1998;16:175; De Simon M. Vacuum 1990;41:2021; Chu JG, Hua ZY. J Vac Sci Technol 1982;20:1101; Amoli A, Ebrahimi R, Hosseinalipour SM. Vacuum 2004;72:427; Sawada T. Bull Jpn Soc Mech Eng 1973;16:993; Joong-Sik Heo, Hwang Young-Kyu. Vacuum 2001;56:133; Sawada T. Bull Jpn Soc Mech Eng 1979;22:362; Amoli A, Hosseinalipour SM. Vacuum 2004;75:361; Sheng Wang, Hisashi Ninokata. Prog Nucl Energy 2005;47:664, but those calculations were either limited to free-molecule flow, or failed to obtain good results in the transition regime. Furthermore, they were usually focused on pumping performance and did not report detailed flow field characteristics. In this study, a three-dimensional direct simulation Monte Carlo (DSMC) code adopting an accurate intermolecular collision model, i.e., a generalized soft sphere (GSS) model, has been developed to simulate the single blade row of a one-stage TMP from free-molecule flow to transition flow without any geometrical simplification. Molecular velocities and position equations are deduced under a rotating frame with consideration for the Coriolis and centrifugal acceleration, and the number of sample molecules is tested for sensitivity. The validity of this study and its accuracy are verified through comparison with previous DSMC results and experimental data, and the deterioration of the maximum pressure ratio in the transition flow regime and the influence of the intermolecular collision model on the maximum pressure ratio calculation are analyzed with the aid of transmission probability. Pumping performance under differing geometrical parameters (clearance between the blade tip wall and the housing wall, and the spacing-chord ratio) is investigated, and detailed flow field characteristics, including the number of molecule-surface collisions, temperature and density distributions, particle traces of single gas components and gas mixtures are all obtained under zero pumping speed.

Original languageEnglish (US)
Pages (from-to)1106-1117
Number of pages12
JournalVacuum
Volume83
Issue number8
DOIs
Publication statusPublished - May 1 2009

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All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films

Cite this

Wang, S., Ninokata, H., Merzari, E., Lei, K., Luo, X., Lu, L., & Kase, K. (2009). Numerical study of a single blade row in turbomolecular pump. Vacuum, 83(8), 1106-1117. https://doi.org/10.1016/j.vacuum.2009.01.007