Oblique Colloidal Lithography for the Fabrication of Nonconcentric Features

Zhi Zhao, Yang Cao, Yangjun Cai, Jian Yang, Ximin He, Peter Nordlander, Paul S. Cremer

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

Herein, we describe the development of oblique colloidal lithography (OCL) and establish a systematic patterning strategy for creating libraries of nanosized nonconcentric plasmonic structures. This strategy combines OCL, capillary force lithography, and several wet and ion etching steps. Hexagonal arrays of nonconcentric gold features were created on glass substrates with highly controllable geometric parameters. The size, geometry, and eccentricity of the gold features could be independently tuned by controlling the experimental conditions. Gaps within surface elements could be shrunk to as small as 30 nm, while the total patterned area was about l cm 2 . The goal was to devise a method that offers a high degree of control over the resolution and morphology of asymmetric structures without the need to resort to electron beam lithography. This technique also enabled the development of numerous surface patterns through the stepwise fabrication of separate elements. Complex features, including dots-surrounded nonconcentric targets, nonconcentric hexagram-disks, and nonconcentric annular aperture arrays, were demonstrated, and their optical properties were characterized. Indeed, spectroscopic studies and FDTD simulations demonstrated that Fano resonances could readily be generated by the nonconcentric gold features. Consequently, our patterning strategy should enable the high-throughput investigation of plasmonic coupling and Fano resonances as a function of the physical parameters of the elements within the nanopattern array.

Original languageEnglish (US)
Pages (from-to)6594-6604
Number of pages11
JournalACS Nano
Volume11
Issue number7
DOIs
StatePublished - Jul 25 2017

Fingerprint

Gold
Lithography
lithography
Fabrication
fabrication
gold
Electron beam lithography
Etching
Optical properties
eccentricity
finite difference time domain method
Throughput
Ions
Glass
Geometry
apertures
etching
Substrates
electron beams
optical properties

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

Zhao, Zhi ; Cao, Yang ; Cai, Yangjun ; Yang, Jian ; He, Ximin ; Nordlander, Peter ; Cremer, Paul S. / Oblique Colloidal Lithography for the Fabrication of Nonconcentric Features. In: ACS Nano. 2017 ; Vol. 11, No. 7. pp. 6594-6604.
@article{4108c22d8a6846f89810473b78443958,
title = "Oblique Colloidal Lithography for the Fabrication of Nonconcentric Features",
abstract = "Herein, we describe the development of oblique colloidal lithography (OCL) and establish a systematic patterning strategy for creating libraries of nanosized nonconcentric plasmonic structures. This strategy combines OCL, capillary force lithography, and several wet and ion etching steps. Hexagonal arrays of nonconcentric gold features were created on glass substrates with highly controllable geometric parameters. The size, geometry, and eccentricity of the gold features could be independently tuned by controlling the experimental conditions. Gaps within surface elements could be shrunk to as small as 30 nm, while the total patterned area was about l cm 2 . The goal was to devise a method that offers a high degree of control over the resolution and morphology of asymmetric structures without the need to resort to electron beam lithography. This technique also enabled the development of numerous surface patterns through the stepwise fabrication of separate elements. Complex features, including dots-surrounded nonconcentric targets, nonconcentric hexagram-disks, and nonconcentric annular aperture arrays, were demonstrated, and their optical properties were characterized. Indeed, spectroscopic studies and FDTD simulations demonstrated that Fano resonances could readily be generated by the nonconcentric gold features. Consequently, our patterning strategy should enable the high-throughput investigation of plasmonic coupling and Fano resonances as a function of the physical parameters of the elements within the nanopattern array.",
author = "Zhi Zhao and Yang Cao and Yangjun Cai and Jian Yang and Ximin He and Peter Nordlander and Cremer, {Paul S.}",
year = "2017",
month = "7",
day = "25",
doi = "10.1021/acsnano.6b07867",
language = "English (US)",
volume = "11",
pages = "6594--6604",
journal = "ACS Nano",
issn = "1936-0851",
publisher = "American Chemical Society",
number = "7",

}

Zhao, Z, Cao, Y, Cai, Y, Yang, J, He, X, Nordlander, P & Cremer, PS 2017, 'Oblique Colloidal Lithography for the Fabrication of Nonconcentric Features', ACS Nano, vol. 11, no. 7, pp. 6594-6604. https://doi.org/10.1021/acsnano.6b07867

Oblique Colloidal Lithography for the Fabrication of Nonconcentric Features. / Zhao, Zhi; Cao, Yang; Cai, Yangjun; Yang, Jian; He, Ximin; Nordlander, Peter; Cremer, Paul S.

In: ACS Nano, Vol. 11, No. 7, 25.07.2017, p. 6594-6604.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Oblique Colloidal Lithography for the Fabrication of Nonconcentric Features

AU - Zhao, Zhi

AU - Cao, Yang

AU - Cai, Yangjun

AU - Yang, Jian

AU - He, Ximin

AU - Nordlander, Peter

AU - Cremer, Paul S.

PY - 2017/7/25

Y1 - 2017/7/25

N2 - Herein, we describe the development of oblique colloidal lithography (OCL) and establish a systematic patterning strategy for creating libraries of nanosized nonconcentric plasmonic structures. This strategy combines OCL, capillary force lithography, and several wet and ion etching steps. Hexagonal arrays of nonconcentric gold features were created on glass substrates with highly controllable geometric parameters. The size, geometry, and eccentricity of the gold features could be independently tuned by controlling the experimental conditions. Gaps within surface elements could be shrunk to as small as 30 nm, while the total patterned area was about l cm 2 . The goal was to devise a method that offers a high degree of control over the resolution and morphology of asymmetric structures without the need to resort to electron beam lithography. This technique also enabled the development of numerous surface patterns through the stepwise fabrication of separate elements. Complex features, including dots-surrounded nonconcentric targets, nonconcentric hexagram-disks, and nonconcentric annular aperture arrays, were demonstrated, and their optical properties were characterized. Indeed, spectroscopic studies and FDTD simulations demonstrated that Fano resonances could readily be generated by the nonconcentric gold features. Consequently, our patterning strategy should enable the high-throughput investigation of plasmonic coupling and Fano resonances as a function of the physical parameters of the elements within the nanopattern array.

AB - Herein, we describe the development of oblique colloidal lithography (OCL) and establish a systematic patterning strategy for creating libraries of nanosized nonconcentric plasmonic structures. This strategy combines OCL, capillary force lithography, and several wet and ion etching steps. Hexagonal arrays of nonconcentric gold features were created on glass substrates with highly controllable geometric parameters. The size, geometry, and eccentricity of the gold features could be independently tuned by controlling the experimental conditions. Gaps within surface elements could be shrunk to as small as 30 nm, while the total patterned area was about l cm 2 . The goal was to devise a method that offers a high degree of control over the resolution and morphology of asymmetric structures without the need to resort to electron beam lithography. This technique also enabled the development of numerous surface patterns through the stepwise fabrication of separate elements. Complex features, including dots-surrounded nonconcentric targets, nonconcentric hexagram-disks, and nonconcentric annular aperture arrays, were demonstrated, and their optical properties were characterized. Indeed, spectroscopic studies and FDTD simulations demonstrated that Fano resonances could readily be generated by the nonconcentric gold features. Consequently, our patterning strategy should enable the high-throughput investigation of plasmonic coupling and Fano resonances as a function of the physical parameters of the elements within the nanopattern array.

UR - http://www.scopus.com/inward/record.url?scp=85026298556&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85026298556&partnerID=8YFLogxK

U2 - 10.1021/acsnano.6b07867

DO - 10.1021/acsnano.6b07867

M3 - Article

C2 - 28704035

AN - SCOPUS:85026298556

VL - 11

SP - 6594

EP - 6604

JO - ACS Nano

JF - ACS Nano

SN - 1936-0851

IS - 7

ER -

Zhao Z, Cao Y, Cai Y, Yang J, He X, Nordlander P et al. Oblique Colloidal Lithography for the Fabrication of Nonconcentric Features. ACS Nano. 2017 Jul 25;11(7):6594-6604. https://doi.org/10.1021/acsnano.6b07867