Off-plane x-ray reflection grating fabrication

Thomas J. Peterson, Casey T. DeRoo, Hannah Marlowe, Randall Lee McEntaffer, Drew M. Miles, James Henry Tutt, Ted B. Schultz

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

Abstract

Off-plane X-ray diffraction gratings with precision groove profiles at the submicron scale will be used in next generation X-ray spectrometers. Such gratings will be used on a current NASA suborbital rocket mission, the Off-plane Grating Rocket Experiment (OGRE), and have application for future grating missions. The fabrication of these gratings does not come without challenges. High performance off-plane gratings must be fabricated with precise radial grating patterns, optically at surfaces, and specific facet angles. Such gratings can be made using a series of common micro-fabrication techniques. The resulting process is highly customizable, making it useful for a variety of different mission architectures. In this paper, we detail the fabrication method used to produce high performance off-plane gratings and report the results of a preliminary qualification test of a grating fabricated in this manner. The grating was tested in the off-plane 'Littrow' configuration, for which the grating is most efficient for a given diffraction order, and found to achieve 42% relative efficiency in the blaze order with respect to all diffracted light.

Original languageEnglish (US)
Title of host publicationOptics for EUV, X-Ray, and Gamma-Ray Astronomy VII
EditorsGiovanni Pareschi, Stephen L. O'Dell, Giovanni Pareschi, Stephen L. O'Dell
PublisherSPIE
Volume9603
ISBN (Electronic)9781628417692, 9781628417692
DOIs
StatePublished - Jan 1 2015
EventOptics for EUV, X-Ray, and Gamma-Ray Astronomy VII - San Diego, United States
Duration: Aug 10 2015Aug 13 2015

Other

OtherOptics for EUV, X-Ray, and Gamma-Ray Astronomy VII
CountryUnited States
CitySan Diego
Period8/10/158/13/15

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Peterson, T. J., DeRoo, C. T., Marlowe, H., McEntaffer, R. L., Miles, D. M., Tutt, J. H., & Schultz, T. B. (2015). Off-plane x-ray reflection grating fabrication. In G. Pareschi, S. L. O'Dell, G. Pareschi, & S. L. O'Dell (Eds.), Optics for EUV, X-Ray, and Gamma-Ray Astronomy VII (Vol. 9603). [960317] SPIE. https://doi.org/10.1117/12.2188302