On-Chip Glass Microspherical Shell Whispering Gallery Mode Resonators

Chenchen Zhang, Alexander Cocking, Eugene Freeman, Zhiwen Liu, Srinivas Tadigadapa

Research output: Contribution to journalArticlepeer-review

10 Scopus citations

Abstract

Arrays of on-chip spherical glass shells of hundreds of micrometers in diameter with ultra-smooth surfaces and sub-micrometer wall thicknesses have been fabricated and have been shown to sustain optical resonance modes with high Q-factors of greater than 50 million. The resonators exhibit temperature sensitivity of -1.8 GHz K-1 and can be configured as ultra-high sensitivity thermal sensors for a broad range of applications. By virtue of the geometry's strong light-matter interaction, the inner surface provides an excellent on-chip sensing platform that truly opens up the possibility for reproducible, chip scale, ultra-high sensitivity microfluidic sensor arrays. As a proof of concept we demonstrate the sensitivity of the resonance frequency as water is filled inside the microspherical shell and is allowed to evaporate. By COMSOL modeling, the dependence of this interaction on glass shell thickness is elucidated and the experimentally measured sensitivities for two different shell thicknesses are explained.

Original languageEnglish (US)
Article number14965
JournalScientific reports
Volume7
Issue number1
DOIs
StatePublished - Dec 1 2017

All Science Journal Classification (ASJC) codes

  • General

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