We show a fully integrated, on-chip, vacuum microtriode fabricated via silicon micromachining processes using carbon nanotubes as field emitters. The triode is constructed laterally on a silicon surface using microelectromechanical systems (MEMS) design and fabrication principles. The technique incorporates high-performance nanomaterials in a MEMS design with mature solid-state fabrication technology to create miniaturized, on-chip power amplifying vacuum devices, which could have important and far-reaching scientific and technological implications.
|Original language||English (US)|
|Number of pages||3|
|Journal||Applied Physics Letters|
|State||Published - May 20 2002|
All Science Journal Classification (ASJC) codes
- Physics and Astronomy (miscellaneous)