On the estimation of intrinsic stresses and elastic moduli in thin films

Research output: Contribution to journalConference article

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Abstract

An approach is presented for the determination of the residual stresses and elastic moduli of particle systems resulting from computer simulations of particle or atomic deposition. The proposed technique is based on fundamental concepts of elasticity and is capable of capturing the variation of stresses and moduli as functions of position within the system. Application to a perfect FCC crystal and a simple particle system is demonstrated.

Original languageEnglish (US)
Pages (from-to)280-290
Number of pages11
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4097
StatePublished - Jan 1 2000
EventComplex Mediums - San Diego, CA, USA
Duration: Jul 30 2000Aug 1 2000

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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