On the rate and uniformity of CdTe deposition in an impinging jet reactor: experimental results

D. W. Snyder, P. J. Sides, E. I. Ko

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Abstract

Cadmium telluride was deposited by the pyrolysis of organometallic precursors in an impinging jet reactor. The deposition was nonuniform when mass transfer limitations were significant. The deposition rate decreased when hydrogen pressure was decreased from 720 to 100 Torr; experiments with inert gases demonstrated the dependence of the reaction rate on the presence of hydrogen. Minima appeared in the deposit profile at low nozzle heights and high flow velocities. Enhanced sublimation of CdTe and slight cooling of the substrate might be responsible for this phenomenon.

Original languageEnglish (US)
Pages (from-to)163-173
Number of pages11
JournalJournal of Crystal Growth
Volume123
Issue number1-2
DOIs
StatePublished - Sep 1992

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All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Inorganic Chemistry
  • Materials Chemistry

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