On Universality in sputtering yields due to cluster bombardment

Robert J. Paruch, Barbara J. Garrison, Maksymilian Mlynek, Zbigniew Postawa

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

Molecular dynamics simulations, in which atomic and molecular solids are bombarded by Arn(n = 60-2953) clusters, are used to explain the physics that underlie the "universal relation" of the sputtering yield Y per cluster atom versus incident energy E per cluster atom (Y/n vs E/n). We show that a better representation to unify the results is Y/(E/U0) versus (E/U0)/n, where U0is the sample cohesive energy per atom or molecular equivalent, and the yield Y is given in the units of atoms or molecular equivalents for atomistic and molecular solids, respectively. In addition, we identified a synergistic cluster effect. Specifically, for a given (E/U0)/n value, larger clusters produce larger yields than the yields that are only proportional to the cluster size n or equivalently to the scaled energy E/U0. This synergistic effect can be described in the high (E/U0)/n regime as scaling of Y with (E/U0)?, where ? > 1.

Original languageEnglish (US)
Pages (from-to)3227-3230
Number of pages4
JournalJournal of Physical Chemistry Letters
Volume5
Issue number18
DOIs
StatePublished - Sep 18 2014

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Sputtering
bombardment
sputtering
Atoms
atoms
Molecular dynamics
Physics
energy
Computer simulation
molecular dynamics
scaling
physics
simulation

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Physical and Theoretical Chemistry

Cite this

Paruch, Robert J. ; Garrison, Barbara J. ; Mlynek, Maksymilian ; Postawa, Zbigniew. / On Universality in sputtering yields due to cluster bombardment. In: Journal of Physical Chemistry Letters. 2014 ; Vol. 5, No. 18. pp. 3227-3230.
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Paruch, RJ, Garrison, BJ, Mlynek, M & Postawa, Z 2014, 'On Universality in sputtering yields due to cluster bombardment', Journal of Physical Chemistry Letters, vol. 5, no. 18, pp. 3227-3230. https://doi.org/10.1021/jz501545t

On Universality in sputtering yields due to cluster bombardment. / Paruch, Robert J.; Garrison, Barbara J.; Mlynek, Maksymilian; Postawa, Zbigniew.

In: Journal of Physical Chemistry Letters, Vol. 5, No. 18, 18.09.2014, p. 3227-3230.

Research output: Contribution to journalArticle

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