One-step production of superhydrophobic coatings on flat substrates via atmospheric Rf plasma process using non-fluorinated hydrocarbons

Seul Hee Lee, Zachary R. Dilworth, Erik Hsiao, Anna L. Barnette, Matthew Marino, Jeong Hoon Kim, Jung Gu Kang, Tae Hwan Jung, Seong Kim

Research output: Contribution to journalArticlepeer-review

34 Scopus citations

Abstract

This paper describes the direct deposition of hydro carbon coatings with a static water contact angle higher than 150 using simple C6 hydrocarbons as a reactive gas in helium plasma generated in ambient air without any preroughening of the silicon (100) substrate. The film morphology and hydrophobicity are found to strongly depend on the structure of the reagent hydrocarbon. The films deposited with n-hexane and cyclohexane exhibited relatively smooth morphology and the water contact angle was only ̃95°, similar to polypropylene. When benzene was used as a main reactive gas, the deposited film surface showed nanoscale textured morphology and superhydrophobicity with a water contact angle as high as 167°. Because the plasma is generated in air, all films show some degree of oxygen incorporation. These results imply that the incorporation of a small amount of oxygenated species in hydrocarbon films due to excitation of ambient air is not detrimental for superhydrophobicity, which allows the atmospheric rf plasma with the benzene precursor to produce rough surface topography needed for superhydrophobicity.

Original languageEnglish (US)
Pages (from-to)476-481
Number of pages6
JournalACS Applied Materials and Interfaces
Volume3
Issue number2
DOIs
StatePublished - Feb 23 2011

All Science Journal Classification (ASJC) codes

  • Materials Science(all)

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